Surface shape detection device and surface shape detection method

Abstract

The invention discloses a surface shape detection device and a surface shape detection method that a phase bending surface shape detection method and a laser interference surface shape detection method are combined; the surface shape detection device comprises an imaging unit, a light path adjusting unit, a reference mirror group, a laser interference illumination unit and a phase bending projection unit; the phase bending projection unit and the reference mirror group have the conjugation relationship; and the light of a pattern projected by the phase bending projection unit reaches a surfaceto be detected after passing through the reference mirror group. According to the surface shape detection device and the surface shape detection method provided by the invention, while the detectionprecision of the laser interference detection method is kept, the dynamic range is enlarged; the error band coverage is wide; detection from a low-frequency surface shape to medium-high frequency error can be carried out; full-aperture detection can be rapidly completed without scanning; an extra complex posture calibration process is not required in the system; and posture adjustment of the detection system can be completed based on laser spot alignment of a laser interference light path itself.

Description

technical field [0001] The present invention relates to the technical field of optical element detection, and more specifically, to a surface shape detection device; the present invention also relates to a surface shape detection method applied to the surface shape detection device. Background technique [0002] With the development of science and technology in the fields of aerospace remote sensing, astronomical observation, and various military and civilian device manufacturing, people have higher and higher requirements for the manufacturing precision of optical components used in them, especially spherical and aspheric mirror components. The quality inspection during the production and processing of these components also puts forward higher requirements. [0003] At present, high-precision surface shape detection technologies for optical components include contour scanning method, Shaker-Hartmann detection method, phase deflection method, laser interferometry and so on. ...

AI Technical Summary

Problems solved by technology

However, multiple sets of detection systems that operate according to different measurement principles increase the cost of detection equipment selection and system maintenance. At the same time, different equipment has different requirements for the processing of the supporting tooling and the adjustment of the position and posture of the tested piece during detection. , which also limits the efficiency of optical component fabrication and inspection

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