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Group-combined terahertz metal-coated hollow-core rectangular waveguide manufacturing method

A technology of metal coating and rectangular waveguide, which is applied to waveguides, waveguide-type devices, circuits, etc., can solve the problems of low manufacturing efficiency, poor implementability, and difficulty in core mold dissolution, and achieve high manufacturing efficiency, time saving, and high reproducibility Effect

Active Publication Date: 2021-05-25
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method realizes the construction of a terahertz rectangular waveguide microcavity based on a rectangular core mode, which makes it difficult to dissolve the core mode inside the long and narrow cavity, resulting in low manufacturing efficiency and poor implementability.

Method used

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  • Group-combined terahertz metal-coated hollow-core rectangular waveguide manufacturing method
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  • Group-combined terahertz metal-coated hollow-core rectangular waveguide manufacturing method

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Embodiment Construction

[0030] In order to make the content of the present invention easier to understand, the present invention will be further explained in detail below based on a manufacturing verification example of a "concave" cavity combined with the accompanying drawings.

[0031] Figure 1-1 to Figure 1-2 The fabrication process of the waveguide cavity of the group terahertz metal-coated hollow-core rectangular waveguide is illustrated. Such as Picture 1-1 As shown, the thickness is H 1 The pure copper plate workpiece is processed to obtain a length of L 1 , the width is W 1 , A group groove structure with a spacing of S. Such as Figure 1-2 As shown, using micro-electroplating gold technology to electroplate a pure gold layer on the electrolytic wire cutting surface of the group groove and the unprocessed area on the upper and lower surfaces of the pure copper flat workpiece, the thickness of which is D 1 On the order of tens of nanometers to several microns.

[0032] Figure 2-1 to ...

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Abstract

The invention relates to a method for manufacturing a group-combined terahertz metal-coated hollow-core rectangular waveguide, which belongs to the field of precision manufacturing of terahertz micro-devices. It is characterized in that: manufacturing the waveguide cavity of the group terahertz metal-coated hollow rectangular waveguide; manufacturing the upper cover plate of the group terahertz metal-coated hollow rectangular waveguide; manufacturing the lower cover plate of the group terahertz metal-coated hollow rectangular waveguide; The manufactured group waveguide cavity, upper cover plate, and lower cover plate are combined; the combined workpieces are cut and separated in sequence to obtain a group-combined terahertz metal-coated hollow rectangular waveguide. The present invention can realize the precise manufacture of multiple high operating frequencies or even arbitrary operating frequency terahertz metal-coated hollow rectangular waveguides at one time, which is of great significance.

Description

technical field [0001] The invention relates to a method for manufacturing a group-combined terahertz metal-coated hollow-core rectangular waveguide, which belongs to the field of precision manufacturing of terahertz micro-devices. Background technique [0002] The transmission, construction, reception, and detection of terahertz waves strongly depend on various high-quality terahertz microstructure devices in terahertz systems. Terahertz waveguide is one of the most representative key core devices, with complex and diverse types. Metal hollow-core coated rectangular waveguide has the advantages of low loss, good flexibility and high safety, and its application requirements are increasingly urgent. Due to the transmission characteristics, the terahertz metal hollow rectangular waveguide is a typical micro-device with a large aspect ratio. The metal rectangular waveguide has a cavity end face size of 127um×254um, a surface roughness of Ra≤0.4um, and a fillet radius of R≤30um...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P3/12H01P11/00
CPCH01P3/12H01P11/002
Inventor 毕晓磊胡孝昀曾永彬曲宁松高兵程浩
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS