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An optical detection device and method thereof

An optical detection and defect detection technology, applied in the field of optical detection, can solve the problems of reducing the detection speed, limited depth of focus, and increasing the complexity of the equipment, so as to reduce the complexity and improve the detection speed.

Active Publication Date: 2021-09-28
SHANGHAI YUWEI SEMICON TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing problem is that the existing equipment has a limited depth of focus and cannot meet the simultaneous detection of different height features. It is necessary to obtain height information through interferometers and other methods to re-test after vertical focusing, which reduces the detection speed and increases the complexity of the equipment. sex

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  • An optical detection device and method thereof
  • An optical detection device and method thereof
  • An optical detection device and method thereof

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Embodiment Construction

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

[0036] figure 1 It is a structural schematic diagram of an optical detection device in the prior art; as figure 1 As shown, the optical detection device includes a workpiece table 1, an object table 2, a light source 4, a camera 6, a control unit 7 and a bracket 5, wherein the object table 2 is located on the workpiece table 1, and the object to be measured 3 is located on the object table 2 On the top of the stage 2, a light source 4 and a camera 6 are sequentially arranged. The light source 4 is fixedly connect...

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Abstract

The invention discloses an optical detection device and a method thereof, wherein the device includes a workpiece table; Including the first light source, the second light source and the third light source whose light source direction vectors are not coplanar; the camera is located above the light source unit, and the distance between the focal plane of the camera and the surface of the object to be measured can be adjusted; the control unit, They are electrically connected to the light source unit and the camera respectively, and are used to control the light source unit to output different lighting conditions; and under different lighting conditions, the camera is controlled to obtain the surface image of the object under test and the defect detection image respectively, and according to the surface image of the object to be measured and the defect detection The image acquires clear images of the surface of the object under test at different heights, so that the features of the surface of the object at different heights can be detected without refocusing.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to an optical detection device and a method thereof. Background technique [0002] Concepts such as "Moore's Law" have led the integrated circuit (Integrated circuit, IC) industry from the era of pursuing process technology nodes to a new era that relies more on the development of chip packaging technology. Compared with traditional packaging, Wafer Level Packaging (WLP) has significant advantages in reducing package size and saving process costs. Therefore, WLP will be one of the main technologies to support the continuous development of IC in the future. [0003] WLP mainly includes welding Pillar / Gold / Solder Bump, redistribution layer RDL, through silicon via (ThroughSilicon Via, TSV) and other process technologies. In order to increase the yield rate of chip manufacturing, chip defect detection is required throughout the packaging process. Early equipment mainly focu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/88G01N21/01
CPCG01N21/01G01N21/8806
Inventor 杨朝兴
Owner SHANGHAI YUWEI SEMICON TECH CO LTD