Alignment method of maskless laser direct writing lithography device during sheet-to-roll producing

Abstract

The invention provides an alignment method of a maskless laser direct writing lithography device during sheet-to-roll producing. Single-sheet exposure is changed into roll-to-roll continuous exposure.The technical problems of the length error of the retracting plate and the spacing error of sheets of a winding and unwinding mechanism are overcome. A roll-to-roll maskless laser direct writing lithography device comprises the steps that in a sheet-to-roll production mode, the device automatically searches for an alignment target and starts alignment; the alignment result of the previous sheet is used to calculate the cumulative plate feeding error; and the device automatically corrects the alignment parameters of the next sheet and then performs an exposure process. According to the invention, the alignment problem of the roll-to-roll maskless laser direct writing lithography device during sheet-to-roll producing is overcome; aiming at the sheet-feed error and the sheet spacing error generated during sheet-to-roll producing, the coordinates of the target point recorded by sheet alignment are used as the positioning marks for an alignment camera, which corrects the sheet-feed error and the sheet spacing error, and saves the target searching time of the camera.

Description

technical field [0001] The invention relates to the technical field of alignment of roll-to-roll maskless laser direct writing lithography equipment, in particular to an alignment method for maskless laser direct writing lithography equipment when producing sheet-to-roll. Background technique [0002] The rewinding and unwinding machine of the roll-to-roll maskless laser direct writing lithography equipment is a set of motor-driven idler rollers and a dust sticking machine as the main structural components. The soft board it carries is highly flexible, and the motor can drive the roller (reel) of the winder to curl the exposed board (sheet) and collect it on the reel. The winder and unwinder are respectively placed on both sides of the exposure part. During exposure, the soft board passes through the exposure machine and connects to the winder and unwinder on both sides. Among them, the roll-to-roll maskless laser direct writing lithography equipment. When working, the unwi...

AI Technical Summary

Problems solved by technology

However, in fact, it is necessary to consider the interval error generated by each piece of production, assuming it is 50um (in fact, it is not accurately determined), and the field of view of the alignment camera is about 10mm. In the case of no piece alignment, after 200 productions, the accumulated The error is beyond the field of view of the alignment camera, and production is interrupted

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