Alignment method for maskless laser direct writing lithography equipment in production of sheet-to-roll

Abstract

An alignment method for maskless laser direct writing lithography equipment in the production of sheet-to-roll, which can realize the conversion of single-sheet exposure into roll-to-roll continuous exposure, and can overcome the length error of the rewinding and unwinding mechanism and the film spacing technical error. Based on the roll-to-roll maskless laser direct writing lithography equipment, it includes the following steps: in the sheet-to-roll production mode, automatically search for the alignment target and start alignment; use the alignment result of the previous sheet to calculate the cumulative board feed Error, automatically correct the alignment parameters of the next piece before performing the exposure process. The invention overcomes the alignment problem of the roll-to-roll maskless laser direct writing lithography equipment in the production of sheet-to-roll, and aims at the sheet-to-roll production process of the sheet-feeding error and the sheet spacing error, and the recording of sheet alignment The coordinates of the target point are used as a positioning mark for aligning the camera, which corrects the film advance error and film spacing error, and saves the time for the camera to search for the target.

Description

technical field [0001] The invention relates to the technical field of alignment of roll-to-roll maskless laser direct writing lithography equipment, in particular to an alignment method for maskless laser direct writing lithography equipment when producing sheet-to-roll. Background technique [0002] The rewinding and unwinding machine of the roll-to-roll maskless laser direct writing lithography equipment is a set of motor-driven idler rollers and a dust sticking machine as the main structural components. The soft board it carries is highly flexible, and the motor can drive the roller (reel) of the winder to curl the exposed board (sheet) and collect it on the reel. The winder and unwinder are respectively placed on both sides of the exposure part. During exposure, the soft board passes through the exposure machine and connects to the winder and unwinder on both sides. Among them, the roll-to-roll maskless laser direct writing lithography equipment. When working, the unwi...

AI Technical Summary

Problems solved by technology

However, in fact, it is necessary to consider the interval error generated by each piece of production, assuming it is 50um (in fact, it is not accurately determined), and the field of view of the alignment camera is about 10mm. In the case of no piece alignment, after 200 productions, the accumulated The error is beyond the field of view of the alignment camera, and production is interrupted

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