Eddy current-based rotation angle measuring device

Abstract

An eddy current-based rotation angle measuring device is provided. The eddy current-based rotation angle measuring device comprises a fixed portion and a rotating portion; the fixed portion comprisesan eddy current sensor, a sensor fixing frame, and a base; the rotating portion comprises a steering mirror and a swinging piece; the swinging piece is fixedly connected with the steering mirror through a deep groove ball bearing and a pin; the swinging piece swings with the rotation of the steering mirror; and the steering mirror is driven by a voice coil motor or a piezoelectric ceramic motor toform different rotation angles. During the rotation of the steering mirror, the change in the distance between the eddy current sensor and the swinging piece will form a pair of differential signalsto change the inductance of the eddy current, so that the change in the distance and the change in the angle of the steering mirror are obtained through the change in the inductance, and the purpose of rotation angle measuring is achieved. The rotation angle measuring device provided by the present invention has a simple structure, a measurement range is large and adjustable, angle measuring accuracy is high, and batch manufacturing can be realized in a facilitated manner.

Description

technical field [0001] The invention relates to the technical field of photoelectric scanning and tracking, in particular to a rotational angle measuring device. Background technique [0002] The goniometer sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. At present, the mainstream angle measuring sensors on the market include photoelectric encoders, resolvers and disc-type inductive synchronizers. [0003] The photoelectric encoder is commonly known as the circular grating, which uses the moire fringes generated by the circular grating and the photoelectric conversion technology to output the angle information in the form of pulses. Compared with other goniometer sensors, the circular grating has the advantages of small size, light weight, high measurement accuracy, fast response speed, strong anti-interference ability, and convenient use, and has...

AI Technical Summary

Problems solved by technology

[0006] Among the three types of angle sensors, the circular grating has the advantages of good dynamic performance of measurement, strong anti-interference ability, and high measurement accuracy. The disadvantage is that it requires high machining accuracy and installation accuracy of the mechanical axis, and its price is relatively high.

[0007] The current circular grating with the highest angle measurement accuracy, due to the limitation of the photolithography process, makes it difficult to improve the angle measurement accuracy of the circular grating, especially for the small radius circular grating, its angle measurement accuracy has become a limiting instrument in many precision measuring instruments Key Factors for Accuracy

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