Film thickness detection device, detection method and evaporation equipment

Abstract

The invention discloses a film-forming thickness detection device, a detection method and evaporation equipment. The film-forming thickness detection device comprises: a crystal vibrator, which is located on the evaporation side of the vapor deposition source and is spaced apart from the vapor deposition source. The crystal vibrator can vibrate the crystal The film thickness information on the chip is converted into vibration frequency information; the guiding assembly includes a housing cavity and a guiding channel communicating with the housing cavity, the housing cavity accommodates the crystal oscillator, the guiding channel has an inlet facing the evaporation source, and the evaporation material of the evaporation source It is possible to reach the crystal oscillator plate and form a film under the guidance of the guide channel through the introduction port, wherein the introduction port can move between the crystal oscillator plate and the evaporation source to expand and contract the guide channel. The film-forming thickness detection device provided by the invention can accurately detect the film-forming thickness on the crystal oscillator plate.

Description

technical field [0001] The invention relates to the field of evaporation, in particular to a film thickness detection device, a detection method and evaporation equipment. Background technique [0002] With the advancement of science and technology and the development of society, people have higher and higher requirements for display devices, which in turn prompts higher and higher standards for devices and processes for preparing display devices. Organic Light-Emitting Diode (OLED) has the advantages of self-illumination, no need for backlight, high contrast, thin thickness, wide viewing angle, simple structure and process, etc., OLED display panels are widely used. [0003] One of the most important steps in the production process of the OLED display panel is to coat the organic layer on the substrate to be evaporated to form key light-emitting elements. At present, the evaporation process is mainly used. After the material to be formed is heated and evaporated or sublima...

AI Technical Summary

Problems solved by technology

However, the thickness of the film layer structure of the OLED display panel will have an impact on the performance of the OLED display panel. If the film layer structure of the OLED display panel can be accurately tested, it will have a positive effect on improving the quality of the OLED display panel.

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