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Full-automatic soaking type film preparation device with mechanical arm

A mechanical arm and fully automatic technology, applied in liquid chemical plating, metal material coating process, coating, etc., can solve the problems of fewer assembly layers and large soaking time errors, so as to improve quality and efficiency and save time and human effect

Pending Publication Date: 2020-01-21
FUJIAN INST OF RES ON THE STRUCTURE OF MATTER CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to improve the deficiencies in the prior art, the present invention provides a device for fully automatic immersion-type film preparation with a robotic arm, which is used to replace manual immersion-type film preparation work to reduce the large soaking time error and the assembly layer Inadequacies such as few

Method used

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  • Full-automatic soaking type film preparation device with mechanical arm
  • Full-automatic soaking type film preparation device with mechanical arm
  • Full-automatic soaking type film preparation device with mechanical arm

Examples

Experimental program
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Embodiment 1

[0062] This embodiment provides a device for fully automatic immersion film preparation with a robotic arm, the device includes a robotic arm, a motion mechanism, a control system, and a reaction vessel (not shown);

[0063] The mechanical arm is arranged above the reaction container and connected with the motion mechanism, the mechanical arm is used to grasp the substrate for thin film growth, and immerse the substrate in the reaction container;

[0064] The motion mechanism is used to drive the mechanical arm to complete the action; the control system is connected to the motion mechanism, and the control system is used to receive the instruction signal and convert the instruction signal into an instruction to control the movement of the motion mechanism; the reaction container is a A container for the reaction solution.

[0065] The device also includes a housing for sealing the device to prevent external conditions from affecting the film growth process. In order to facili...

Embodiment 2

[0075] The metal-organic framework (taking the classic HKUST-1 as an example) thin film is prepared by using the device described in the above embodiment 1, and the device is selected according to the laboratory with a smaller size such as 70*30*50cm (length / width / height), At the same time, the reaction vessel selects the glass container routinely used in the laboratory, which specifically includes the following steps:

[0076] Weigh copper acetate and trimesic acid, dissolve them in pure ethanol solution, and prepare 500ml of solutions with concentrations of 1mmol / L and 0.4mmol / L respectively.

[0077] Pour the prepared solution into the container, and place the container under the robotic arm in the order of copper acetate ethanol solution → ethanol solution → trimesic acid ethanol solution → ethanol solution. Measure the distance between adjacent containers. Then, the quartz glass modified with hydroxyl groups is used as the growth substrate, and the quartz glass is fixed ...

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Abstract

The invention provides a full-automatic soaking type film preparation device with a mechanical arm. The device can set corresponding parameters for a control system according to the will of an operator to control the mechanical arm to stretch up and down in the Z-axis direction and control the moving distance in the X-axis direction, and a substrate can be accurately soaked in film coating liquidin a reaction container. The retention time of the mechanical arm in the film coating liquid can be controlled to guarantee quality-guaranteeing growth of films. The cycle index of the whole operationcan be further controlled to guarantee preparation of the films with different thicknesses. The device overcomes various defects of manual soaking work, such as the problems of large soaking time error and uneven assembly thickness, has the capacity of preparing the films in a complex environment, and improves the quality and efficiency of film materials.

Description

technical field [0001] The invention belongs to the technical field of fully automatic devices of manipulators, and in particular relates to a device for preparing thin films on a surface-modified substrate through a fully automatic immersion method of manipulators. Background technique [0002] Thin films are very versatile and common materials in applications such as sensors and devices. In particular, layer-by-layer self-assembled thin-film materials have good surface morphology and adjustable film thickness, which have attracted much attention in the fields of optics, electricity, magnetism, and catalysis. However, how to effectively prepare layer-by-layer self-assembled thin film materials is a great challenge in current material preparation. At present, the preparation of layer-by-layer self-assembled films is mainly achieved by manual immersion and spin coating, but this method still has some disadvantages, such as manual immersion and spin coating methods are diffic...

Claims

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Application Information

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IPC IPC(8): C23C18/16C23C18/40
CPCC23C18/1639C23C18/1651C23C18/1658C23C18/1675C23C18/40
Inventor 谷志刚李德晶康遥张健
Owner FUJIAN INST OF RES ON THE STRUCTURE OF MATTER CHINESE ACAD OF SCI