Micro-nano material coating equipment
A coating equipment and micro-nano technology, applied in metal material coating process, sputtering coating, ion implantation coating and other directions, can solve the problems of complicated and cumbersome coating operation and low efficiency of tubular workpieces.
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[0044] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0045] Please refer to Figure 1 to Figure 19 , The present invention provides micro-nano material coating equipment, including: motor A1, coupling A2, bearing plate 3, limit through hole 301, circular installation through hole 302, workpiece holder 4, annular ring 5, annular groove 501, Limiting column 502, circular arc limiting chute 503, motor B6, coupling B7, bearing 8, driving gear 9, ring rack 10, ball 11, circular block 12, square...
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