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Micro-nano material coating equipment

A coating equipment and micro-nano technology, applied in metal material coating process, sputtering coating, ion implantation coating and other directions, can solve the problems of complicated and cumbersome coating operation and low efficiency of tubular workpieces.

Active Publication Date: 2020-02-04
JIAXING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The micro-nano material coating equipment provided by the present invention solves the problem that there are few coating equipment specially suitable for tubular workpieces at present, which leads to complicated and cumbersome coating operations on tubular workpieces and low efficiency.

Method used

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  • Micro-nano material coating equipment

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Embodiment Construction

[0044] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0045] Please refer to Figure 1 to Figure 19 , The present invention provides micro-nano material coating equipment, including: motor A1, coupling A2, bearing plate 3, limit through hole 301, circular installation through hole 302, workpiece holder 4, annular ring 5, annular groove 501, Limiting column 502, circular arc limiting chute 503, motor B6, coupling B7, bearing 8, driving gear 9, ring rack 10, ball 11, circular block 12, square...

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Abstract

The invention provides micro-nano material coating equipment. The micro-nano material coating equipment comprises a motor A, a T type sliding block and a spring. The motor A is fixedly connected witha bearing disc through a coupler A, and six circular installation through holes are formed in the top end face of the bearing disc in an annular array. Six limiting through holes are formed in the adjacent edge portions of the top end face of the bearing disc in an annular array, and the six limiting through holes and the six circular installation through holes are distributed at intervals. The designed micro-nano material coating equipment is suitable for tubular workpieces such as micro-nano materials to use, all-dimensional, uniform and efficient peripheral face coating operation can be conducted on the tubular workpieces such as the micro-nano materials, and the defects of complex, tedious and low-efficiency tubular workpiece coating operation caused by no equipment dedicated to tubular workpiece coating are overcome.

Description

Technical field [0001] The invention belongs to the technical field of material surface coating, more specifically, it particularly relates to a micro and nano material coating equipment. Background technique [0002] At present, the equipment for surface treatment of objects mainly includes vacuum coating, electroplating, light plating, polishing, etc. These coating technologies are currently used in cities to deal with more objects. The magnetron sputtering coating machine produced in it is the mainstream for the coating of objects. Using this kind of machinery to treat the surface of the object can make the surface of the object have a relatively complete film and prevent external factors from affecting it. influences. Magnetron sputtering process is a new type of physical vapor deposition method. The coating medium is deposited on the surface of the powder by sputtering in a vacuum system to form a coating. There is no waste liquid or exhaust gas in the intermediate process,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/35
CPCC23C14/35C23C14/505
Inventor 赵浩徐杨黄风立聂曼
Owner JIAXING UNIV