Optical deflection microscopic surface measuring device and method

Abstract

The invention discloses an optical deflection microscopic surface measuring method. The method comprises the following steps that a structural position parameter S of the optical deflection microscopic surface measuring device is measured and calibrated by adopting three-coordinate measuring equipment; phase distribution of a deformed fringe light signal is calculated according to the measured andcalibrated structural position parameter S, wherein the deformed fringe light signal comprises microscopic surface profile characteristic information of a to-be-measured element; actual light spot distribution corresponding to the microscopic surface of the to-be-measured element is acquired according to the phase distribution; and the actual light spot distribution is compared with preset ideallight spot distribution to obtain a microscopic surface profile of the to-be-measured element. Correspondingly, the invention further discloses an optical deflection microscopic surface measuring device. By means of the method and the device, the microscopic measurement technical scheme with the high precision, the low cost, the high spatial resolution and the high measurement speed is realized.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to an optical deflection microscopic surface measurement device and method. Background technique [0002] In recent years, with the development of micro-nano technology, the demand for the measurement of micro-deformation of components has gradually increased, and the requirements for measurement accuracy and speed have also continued to increase. In the prior art, the microscopic measurement of the reflective surface is usually achieved through technical solutions such as optical interferometer measurement method and scanning microscope measurement method. However, the optical interferometer measurement method has disadvantages such as small measurement dynamic range, susceptibility to environmental interference, and high detection cost. Scanning microscopy measurement methods, such as transmission electron microscopy (STEM), have extremely high horizontal and vertical resolu...

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Problems solved by technology

However, the optical interferometer measurement method has disadvantages such as small measurement dynamic range, susceptibility to environmental interference, and high detection cost.

Scanning microscopy measurement methods, such as transmission electron microscopy (STEM), have extremely high horizontal and vertical resolution, but their measurement range is small and the detection cost is high, so they are subject to many limitations in engineering surface measurement

[0003] The Chinese patent application publication number is CN107560564A, an invention patent of a free-form surface detection method and system. This patent uses a traditional optical deflection measurement device, which uses a projection screen, a component to be tested, and a CCD detector to form a reverse Hartmann optical detection. system, although the system can achieve rapid measurement of the surface of the component, but its spatial resolution is low, and it cannot achieve accurate microscopic measurement

A device for microscopic measurement of optical deflection (see Gerd etc., Microdeflectometry-a novel tool to acquire three-dimensional microtopography with nanometer height resolution, "Optics Letters 33(4), 396-398) realizes the detection of the surface shape error of the reflective surface, through the relationship between the fringe phase and the surface slope To solve the surface shape error, the measurement accuracy is low, and the field of view of the device is small, which limits the measurement range

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