Dual-camera parallel confocal differential microscopic 3D topography measurement device and method

Abstract

The invention particularly relates to a dual-camera parallel confocal differential microscopic 3D topography measurement device and method. The device comprises a dual-camera image acquisition module,an illumination module, an optical imaging module and an image analysis and electric objective table control module; the area-array camera is used as a detector, so that the problem of low single-point and layer-by-layer scanning efficiency of the traditional laser confocal technology is solved; a micro-mirror array of a digital micro-mirror device is used as a virtual parallel pinhole to realizenon-contact scanning, non-single-point scanning or non-layer-by-layer scanning is realized, and large-view-field microscopic 3D morphology measurement of a sample can be completed through double-camera parallel confocal differential motion under the condition of no mechanical motion after one-time automatic focusing.

Description

technical field [0001] The invention belongs to the field of optical microscopic imaging and microscopic surface topography measurement, and more specifically relates to a dual-camera parallel confocal differential microscopic 3D topography measurement device and method. Background technique [0002] There are many deficiencies in the existing microscopic three-dimensional shape measurement technology, such as the small detection and observation range of the electronic scanning microscope, and the low environmental anti-interference ability; the optical interferometry method requires a large number of axial scans, which limits the measurement efficiency of this type of method. The dual-detector differential confocal measurement based on the traditional laser scanning confocal microscopy imaging method requires point-by-point scanning, which makes it difficult to achieve real-time and fast three-dimensional measurement; for example, the invention patent of Beijing Institute of...

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Problems solved by technology

[0002] There are many deficiencies in the existing microscopic three-dimensional shape measurement technology, such as the small detection and observation range of electronic scanning microscopes, and the low environmental anti-interference ability; the optical interferometry method requires a large number of axial scans, which limits the measurement efficiency of this type of method

The dual-detector differential confocal measurement based on the traditional laser scanning confocal microscopy imaging method requires point-by-point scanning, which makes it difficult to achieve real-time and fast three-dimensional measurement; for example, the invention patent of Beijing Institute of Technology with application number 201310026956.4 and Harbin Institute of Technology application number 201410617222.8 Invention patents, they achieve axial tomography capability through pinholes, and further improve axial measurement accuracy through differential motion. However, they all need to scan the sample horizontally point by point in order to complete the three-dimensional measurement of the entire field of view. Their The disadvantage is: when the horizontal resolution exceeds 1 million points, it is difficult to achieve multi-point high-precision longitudinal measurement higher than 1Hz

Although this method overcomes the problem of point-by-point scanning in the horizontal direction and layer-by-layer scanning in the vertical direction of the traditional laser scanning confocal 3D measurement technology, there are still shortcomings in this method, and the sample needs to be moved to construct a 3D topography of the field of view.

This method is the same as the phase modulation structured light imaging scheme. One observation field needs to stay to complete the 3D imaging of the observation field FOV, so it is not conducive to the rapid multi-field scanning of large samples that require sub-aperture splicing, and is not conducive to large samples. 3D shape observation and measurement

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