Method for representing anti-irradiation performance of compositionally graded thin film with high throughput
A composition gradient and anti-irradiation technology, which is applied in the direction of material analysis, measuring devices, and analysis materials through electromagnetic means, to achieve the effect of easy operation and improved efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0017] A method for high-throughput characterization of the radiation resistance of a composition gradient film, comprising the following steps:
[0018] Step 1. Place the prepared composition gradient film in an atomic force microscope for thickness characterization or in a thin film resistance surface scanning device for resistance measurement;
[0019] Step 2. Place the composition gradient film exposed to a certain radiation dose in an atomic force microscope for thickness characterization or in a film resistance surface scanning device for resistance value measurement;
[0020] Step 3. Subtract the thickness value measured in step 2 from the thickness value measured in step 1 to obtain the change in thickness, that is, the degree of radiation swelling, or subtract the resistance value measured in step 2 from the resistance value measured in step 1 to obtain the resistance The change in value is the degree of radiation swelling;
[0021] Step 4, the greater the thickness ...
Embodiment 2
[0025] A method for high-throughput characterization of the radiation resistance of a composition gradient film, comprising the following steps:
[0026] Step 1. Place the prepared composition gradient film in an atomic force microscope for thickness characterization or in a thin film resistance surface scanning device for resistance measurement;
[0027] Step 2. Place the composition gradient film exposed to a certain radiation dose in an atomic force microscope for thickness characterization or in a film resistance surface scanning device for resistance value measurement;
[0028] Step 3. Subtract the thickness value measured in step 2 from the thickness value measured in step 1 to obtain the change in thickness, that is, the degree of radiation swelling, or subtract the resistance value measured in step 2 from the resistance value measured in step 1 to obtain the resistance The change in value is the degree of radiation swelling;
[0029] Step 4, the greater the thickness ...
Embodiment 3
[0033] A method for high-throughput characterization of the radiation resistance of a composition gradient film, comprising the following steps:
[0034] Step 1. Place the prepared composition gradient film in an atomic force microscope for thickness characterization or in a thin film resistance surface scanning device for resistance measurement;
[0035] Step 2. Place the composition gradient film exposed to a certain radiation dose in an atomic force microscope for thickness characterization or in a film resistance surface scanning device for resistance value measurement;
[0036] Step 3. Subtract the thickness value measured in step 2 from the thickness value measured in step 1 to obtain the change in thickness, that is, the degree of radiation swelling, or subtract the resistance value measured in step 2 from the resistance value measured in step 1 to obtain the resistance The change in value is the degree of radiation swelling;
[0037] Step 4, the greater the thickness ...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More