Mask plate, manufacturing method thereof, and display panel

Abstract

The invention discloses a mask plate, a manufacturing method thereof, and a display panel. The mask plate comprises: a frame; a first mask strip extending along a first direction; The orthographic projection on the plane covers at least the first centerline of the frame; the first centerline is the centerline of the frame along the first direction; a plurality of second mask strips, and the second mask strips extend along the first direction; the second mask strips A plurality of mask openings are arranged on the top; along the second direction, a plurality of second mask bars are arranged in sequence on both sides of the first mask bar; the second direction is the width direction of the first mask bar; Shading strips; the shielding strips extend along the first direction; a shielding strip is provided at the gap between two adjacent second masking strips, and at the gap between the adjacent first masking strips and the second masking strips strip. The technical solution provided by the invention can solve the problem that the frame of the mask plate is greatly deformed by the central shielding bar, which affects the precision of the mask plate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate, a manufacturing method thereof, and a display panel. Background technique [0002] An organic light-emitting diode (Organic Light-Emitting Diode, OLED) uses evaporation technology to prepare an organic light-emitting layer. During the device preparation process, organic materials are deposited on a substrate by high-temperature evaporation. In order to vapor-deposit organic materials to the pixel area, a high-precision metal mask (Fine Metal Mask, FMM) is placed between the evaporation source and the substrate. With a well-designed mask opening, the organic material can be deposited on the substrate through the mask opening to form a preset pattern corresponding to the mask opening. [0003] However, during the evaporation preparation process, the master needs to be exposed symmetrically, and the area around the line of symmetry is provided with a film thickness m...

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide a mask, a manufacturing method thereof, and a display panel to solve the problem that the frame of the mask is greatly deformed by the central shielding bar and affects the accuracy of the mask of the mask.

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