The present invention relates to a micro optoelectronic device and a preparation method thereof, the preparation method comprising forming a first bonding
dielectric layer on a light-emitting
wafer, opening a first opening at a position corresponding to a first
electrode of the light-emitting
wafer in the first bonding
dielectric layer, forming a first bonding
metal block on the first
electrode, and the first opening surrounding the first bonding
metal block; forming a second bonding
dielectric layer on a driving
wafer, opening a second opening at a position corresponding to a second
electrode of the driving wafer in the second bonding
dielectric layer, forming a second bonding
metal block on the second electrode, and the second opening surrounding the second bonding metal block; directly bonding the second bonding metal block to the first bonding metal block and directly bonding the second bonding
dielectric layer to the first bonding
dielectric layer so that the light-emitting unit is bonded to the
driving circuit in correspondence; and removing the first growth substrate to
expose the light-emitting unit. In the above manner,
hybrid bonding reduces bonding temperature, enhances
bonding strength, and reduces process difficulty and cost.