High-purity coating type polycrystalline silicon crucible

A technology of polysilicon and crucible, which is applied in the field of solar cell production equipment, can solve the problems that the silicon nitride layer is difficult to achieve high density and cannot meet production requirements, etc., and can prevent sintering shrinkage, high isolation, and coating coverage strong effect

Inactive Publication Date: 2015-12-09
WUXI SHUNYANG NEW ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, dense silicon nitride materials must be sintered in the liquid phase under nitrogen protection atmosphere and high temperature environment, and usually the size of dense silicon nitride materials after sint...

Method used

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  • High-purity coating type polycrystalline silicon crucible

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] as attached figure 1 As shown: the present invention is a high-purity coated polysilicon crucible, including a crucible body 1, with several pits 2 evenly distributed on the surface of the crucible itself, and several pits 2 evenly distributed on the surface of the crucible itself. The surface is sequentially attached with a first nitride layer 3, a second oxide layer 4 and a third nitride layer 5;

[0034] The first nitride layer 3 is coated with milky silicon nitride on the surface of the crucible 1 uniformly distributed with several pits 2 by brushing, and the coating of the first nitride layer 3 The thickness range is 2mm;

[0035] The second oxide layer 4 is powdery silicon oxide, and the powdery silicon oxide is sprayed on the surface of the first nitride layer 3 that has not yet condensed in a slurry form by spraying, and the second oxide layer 4 is formed on the first The surface of the nitride layer 3 is granular;

[0036] The third nitride layer 5 is atomiz...

Embodiment 2

[0047] as attached figure 1 As shown: the present invention is a high-purity coated polysilicon crucible, including a crucible body 1, with several pits 2 evenly distributed on the surface of the crucible itself, and several pits 2 evenly distributed on the surface of the crucible itself. The surface is sequentially attached with a first nitride layer 3, a second oxide layer 4 and a third nitride layer 5;

[0048] The first nitride layer 3 is coated with milky silicon nitride on the surface of the crucible 1 uniformly distributed with several pits 2 by brushing, and the coating of the first nitride layer 3 The thickness range is 6mm;

[0049] The second oxide layer 4 is powdery silicon oxide, and the powdery silicon oxide is sprayed on the surface of the first nitride layer 3 that has not yet condensed in a slurry form by spraying, and the second oxide layer 4 is formed on the first The surface of the nitride layer 3 is granular;

[0050] The third nitride layer 5 is atomiz...

Embodiment 3

[0061] as attached figure 1 As shown: the present invention is a high-purity coated polysilicon crucible, including a crucible body 1, with several pits 2 evenly distributed on the surface of the crucible itself, and several pits 2 evenly distributed on the surface of the crucible itself. The surface is sequentially attached with a first nitride layer 3, a second oxide layer 4 and a third nitride layer 5;

[0062] The first nitride layer 3 is coated with milky silicon nitride on the surface of the crucible 1 uniformly distributed with several pits 2 by brushing, and the coating of the first nitride layer 3 The thickness range is 10mm;

[0063] The second oxide layer 4 is powdery silicon oxide, and the powdery silicon oxide is sprayed on the surface of the first nitrided layer that has not yet condensed in a slurry form by spraying, and the second oxide layer 4 is in the first nitrogen The surface of the layer 3 is granular;

[0064] The third nitride layer 5 is atomized sil...

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Abstract

The invention relates to a high-purity coating type polycrystalline silicon crucible, which comprises a crucible body, wherein a plurality of concave pits or annular grooves are uniformly distributed on the surface of the crucible body; a first nitriding layer, a second oxidation layer and a third nitriding layer are sequentially attached to the surface; according to the first nitriding layer, whey type silicon nitride coats the surface of the crucible body provided with uniformly distributed concave pits or annular grooves in a brush coating mode; the second oxidation layer is powder silicon oxide; the powder silicon oxide is spayed onto the surface of the whey type first nitriding layer which is not coagulated in a spraying mode; the second oxidation layer forms particle type on the surface of the first nitriding layer; the third nitriding layer is mist silicon nitride; the mist silicon nitride is sprayed and coated on the surface of the second oxidation layer in a spray coating mode until the particles of the second oxidation layer are covered; the third nitriding layer forms a smooth surface. The crucible has the characteristics that the coating coverage capability is high; the stability is high; a coating layer has a high isolation degree; the crucible body can be prevented from participating in the reaction in the polycrystalline silicon preparation process, and the like.

Description

technical field [0001] The invention relates to the technical field of solar cell production equipment, in particular to a high-purity coated polysilicon crucible. Background technique [0002] As we all know, the power supply in the world is becoming increasingly tense, and the application of photovoltaic technology can effectively alleviate this situation. Photovoltaic power generation mainly includes single crystal and polycrystalline cell technology. Compared with single crystal, polycrystalline photovoltaic has the advantages of low energy consumption and high efficiency; 6 to 7 times of that, so polycrystalline has been widely used in recent years. [0003] In recent years, with the increasing maturity of solar power generation technology, solar cells have been widely used in many fields such as industry, agriculture and aerospace. At present, according to the different materials used, solar cells can be divided into: silicon solar cells, compound thin film solar cel...

Claims

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Application Information

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IPC IPC(8): C30B28/06C30B29/06
Inventor 钟伟陆文研
Owner WUXI SHUNYANG NEW ENERGY
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