Preparation method of electron beam sensitive brittle material transmission electron microscope sample

A technology for transmission electron microscope samples and brittle materials, which is applied in the field of electron beam-sensitive brittle material transmission electron microscope sample preparation, can solve the problems of material surface temperature rise, microstructure damage, microstructure damage, etc., to reduce the bonding temperature and increase the electrical conductivity. , the effect of reducing damage

Pending Publication Date: 2020-03-27
INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS
View PDF5 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Compared with the focused ion beam FIB, the Ar ions used for ion sputtering thinning have a smaller atomic mass, but due to the long sputtering time and energy concentration, it is easy to cause the temperature of the material surface to rise and cause burns
Although the ultra-thin section method can avoid the above-mentioned problems, due to the brittleness of the material, the section process will inev

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of electron beam sensitive brittle material transmission electron microscope sample
  • Preparation method of electron beam sensitive brittle material transmission electron microscope sample
  • Preparation method of electron beam sensitive brittle material transmission electron microscope sample

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0034] Example one:

[0035] An electron beam sensitive brittle material transmission electron microscope sample preparation method, in this embodiment, is specifically used for the preparation of geological mineral TEM samples 4. It includes the following steps:

[0036] Step 1. Prepare the thin sample.

[0037] Select a piece of metastable geological aragonite, use a hacksaw to cut the sample into 0.5cm*0.5cm block samples, and then cut 0.2mm to 0.4mm thick from the block samples with a water-cooled low-speed diamond cutting machine Sheet sample 4. Preferably, the thickness of the sample 4 cut in this application is 0.3 mm.

[0038] Step 2. Water mill pre-thinning the thin sample.

[0039] In this embodiment, specifically, the sheet sample is bonded to the sample preparation mold and the front and back sides are polished. Such as figure 1 Shown is a schematic diagram of the sample preparation mold used in this embodiment. The sample preparation mold is divided into an inner mold 1...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Graininessaaaaaaaaaa
Thicknessaaaaaaaaaa
Login to view more

Abstract

The invention discloses a preparation method of an electron beam sensitive brittle material transmission electron microscope sample. The preparation method comprises the following steps: A, preparinga sheet sample; B, carrying out water milling pre-thinning on the sheet sample; C, performing low-temperature ion sputtering thinning on the pre-thinned sheet sample; and D, carrying out carbon spraying treatment on the surface of the sheet sample subjected to low-temperature ion sputtering thinning, so as to deposite a layer of amorphous carbon film on the surface of the sheet sample. According to the method, measures such as liquid nitrogen cooling, carbon spraying treatment and the like are adopted, so that the influence of adverse factors such as charge accumulation and the like on the microstructure of the sample in the TEM sample preparation process is reduced.

Description

technical field [0001] The invention relates to the technical field of transmission electron microscope sample preparation, in particular to a method for preparing a transmission electron microscope sample of an electron beam-sensitive brittle material. Background technique [0002] In the structure research of electron beam-sensitive brittle materials, micro-nano-scale structural characterization relying on transmission electron microscopy (TEM) has always been a major problem, and the root of this problem lies in the preparation of TEM samples for brittle materials. [0003] Currently widely used TEM sample preparation methods are focused ion beam (FIB) micro-nano processing, ion sputtering thinning and ultrathin sectioning. Focused ion beam FIB prepares TEM samples for transmission electron microscopy. Usually, at an accelerating voltage of 30kV, Ga ions are used to etch the material at a high speed to achieve thinning, which has the advantages of high precision and high ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N1/28G01N23/2005G01N23/04G01N23/20
CPCG01N1/28G01N23/2005G01N23/04G01N23/20
Inventor 王胜男竺鑫桥袁洪魏唐明峰甘海啸梁晓辉温茂萍
Owner INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap