Method for measuring and calculating relationship between vacuum degree of low-temperature gas cylinder and daily evaporation rate and adsorption capacity
A technology of vacuum degree and evaporation rate, which is applied in the field of measuring the relationship between the vacuum degree of low-temperature gas cylinders and the daily evaporation rate and adsorption capacity, and can solve the problems of difficulty in evaluating the vacuum life period of the interlayer of low-temperature gas cylinders.
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[0020]The present invention will be further described in detail below in conjunction with specific embodiments and accompanying drawings.
[0021] The calculation method of the relationship between the vacuum degree of the cryogenic gas cylinder, the daily evaporation rate and the adsorption capacity, the steps of the method are as follows:
[0022] (1) Prepare the measuring device, such as figure 1 As shown, the measuring device includes: mass flow meter 1, vacuum measuring pipe 2, vacuum gauge 3, burette 52, vacuum fine-tuning valve 51, silicone oil 5, vacuum valve 6, evacuation valve 71, air source valve 81, air source 8, vacuum Unit 7; in the present embodiment, the accuracy of the mass flowmeter 1 is not less than 1%; the vacuum gauge 3 has a range of 10 5 Pa~10 -5 The composite vacuum gauge of Pa has an accuracy of not less than 15%. Silicone oil 5 is diffusion pump silicone oil available on the market. Quantitative gas brings influence; One port of vacuum measuring p...
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