Ion source and plasma processing apparatus
An ion source and annular cavity technology, applied in the field of ion source, can solve the problem of high efficiency loss, achieve the effect of smooth circuit, reduce heat flux, and reduce collision loss
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[0037] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.
[0038] An embodiment of the present invention provides an ion source, which may also be referred to as an ion generator, an ion generator or an ion source generator, for generating plasma. The plasma referred to in the present invention is an ionized gas-like substance composed of atoms deprived of some electrons and positive and negative electrons generated after the atoms are ionized. The plasma generated by the ion source ...
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