Differential lithium niobate modulator
A technology for separating lithium niobate and a modulator is applied in the field of differential lithium niobate modulator, which can solve the problems of reduced performance of the modulator, easy to be affected by external noise, increased cost, etc., so as to improve the modulation depth, improve the modulation efficiency, Strong anti-interference ability
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Embodiment 1
[0028] see figure 1 As shown, the embodiment of the present invention provides a differential lithium niobate modulator, which includes a base layer 1, a substrate layer 2, an integrated waveguide layer 3, and a cover layer 4 from bottom to top, and the integrated waveguide layer 3 includes lithium niobate A waveguide layer 301 and two high refractive index layers 302 distributed at intervals, the high refractive index layer 302 is located between the lithium niobate waveguide layer 301 and the cladding layer 4; at the same time,
[0029] The modulator also includes a first electrode group 5 and two oppositely arranged second electrode groups 6, the first electrode group 5 is located in the substrate layer 2, and the two second electrode groups 6 are located in the Above the integrated waveguide layer (3);
[0030] The first electrode group 5 includes a first metal electrode 501 in direct contact with a first conductive layer 502 from bottom to top, and the projections of the...
Embodiment 2
[0040] The difference between the embodiment of the present invention and the first embodiment is only that there are isolations between the first conductive layer 502 and the lithium niobate waveguide layer 301, and between the second conductive layer 601 and the high refractive index layer 302. layer, the isolation layer is a low refractive index material.
[0041] The working principle of the electro-optic modulator provided by the embodiment of the present invention is as follows:
[0042] The electro-optic modulator provided by the present invention is a differential lithium niobate modulator, wherein the first electrode group is "ground" and can be marked as "G"; the two symmetrically placed second electrode groups are two signal electrodes, which are respectively marked as "S1" and "S2". When the differential modulator is in operation, different voltages are applied to the two signal electrodes "S1" and "S2", respectively. In the embodiment of the present invention, t...
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Abstract
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