High-Q-value bulk acoustic wave resonator
A bulk acoustic wave resonator and high-sound technology, applied in the field of microelectronics, can solve problems such as acoustic wave leakage, achieve the effect of improving Q value and reducing lateral leakage
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[0026] A bulk acoustic wave resonator includes a substrate 1 , a piezoelectric stack structure, a high acoustic impedance annular raised structure 6 and a low acoustic impedance annular raised structure 7 . The piezoelectric stack structure includes a bottom electrode 3 formed on a substrate 1 , a piezoelectric layer 4 formed on the bottom electrode 3 , and a top electrode 5 formed on the piezoelectric layer 4 . A cavity 2 is provided between the substrate 1 and the bottom electrode 3 as an acoustic reflection structure, so that the sound waves propagating longitudinally are confined in the effective area. One or more high-acoustic-impedance annular raised structures 6, and one or more low-acoustic-impedance annular raised structures 7 surround the boundary of the top electrode 5, effectively reflecting sound waves propagating laterally, thereby improving the Q value of the resonator . Such as Figure 2a and Figure 2b As shown, the high acoustic impedance annular raised st...
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