Force-heat coupling micro electro mechanical system, in-situ mechanical platform and manufacturing method

Abstract

The invention relates to the technical field of high-temperature micro-nano experimental mechanics devices, and discloses a force-heat coupling micro electro mechanical system, an in-situ mechanical platform and a manufacturing method. The force-heat coupling micro electro mechanical system comprises a base body, a T-shaped heating end, a C-shaped heating end, an internal temperature constraint structure and a driving end temperature constraint structure, wherein a cross rod part of the T-shaped heating end is nested in the C-shaped heating end at intervals to form a sample carrying area; thelongitudinal rod part extends out of the opening side of the C-shaped heating end and is connected to the internal temperature constraint structure, and the internal temperature constraint structure is mounted at the bottom of the groove; the C-shaped heating end is connected to the driving end temperature constraint structure, and the driving end temperature constraint structure is installed at agroove opening of the groove. By arranging the T-shaped heating end and the C-shaped heating end which are matched with each other, the thermal mass of a heating area can be reduced, the power can bereduced, the thermal drift can be reduced, and the mechanical loading of tension, compression, shearing and the like of a sample can be realized while in-situ atomic resolution mechanical-thermal coupling test of heating and temperature rising is combined.

Description

technical field [0001] The invention relates to the technical field of high-temperature micro-nano experimental mechanical devices, in particular to a mechanical-thermal coupling micro-electromechanical system, an in-situ mechanical platform and a manufacturing method. Background technique [0002] In situ observation technology is a research hotspot in transmission electron microscopy research. By applying various physical effects on the sample, such as external stimuli such as electricity, magnetism, force, heat, etc., using a transmission electron microscope (Transmission Electron Microscope, referred to as TEM) to observe the changes in the microstructure and chemical state of the material, the material can be studied intuitively. Or the performance of devices in actual use has important practical significance for the study of material properties. Due to the complex structure, high technical requirements, and high price of in-situ sample stages based on different physic...

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Problems solved by technology

[0004] The embodiment of the present invention provides a mechanical-thermal coupling micro-electromechanical system, an in-situ mechanical platform and a manufacturing method to solve the problems that the existing in-situ mechanical platform has a low temperature application range and a single mechanical test performance

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