The invention relates to the technical field of
infrared detection, in particular to an ultra-miniature MEMS throttling
refrigeration infrared detector which comprises an MEMS refrigerator and a packaging Dewar. The MEMS refrigerator comprises a refrigerator heat exchange channel, the packaging Dewar comprises a shell and a
ceramic substrate sealed in the shell in a vacuum manner, one face of the
ceramic substrate is bonded with the
refrigeration heat exchange channel through low-temperature glue, and the other face of the
ceramic substrate is fixedly provided with a
cold shield and a
chip; and the refrigerator heat exchange channel comprises a throttling element, a cold fluid channel and a hot fluid channel, one end of the hot fluid channel is provided with a gas inlet connected with a high-pressure gas source, the other end of the hot fluid channel is communicated with one end of the cold fluid channel after passing through the throttling element, and the other end of the cold fluid channel is provided with a gas outlet which flows to the
atmosphere through a channel of the shell. According to the
chip-level ultra-miniature refrigerator, a micro-flow channel is prepared through the MEMS technology to replace a mechanically-wound capillary tube, and the advantages that the technology is novel, and the refrigerator is low in heat
mass, small in size, low in vibration, free of
magnetism and the like are achieved.