Ultra-miniature MEMS throttling refrigeration infrared detector

An infrared detector and refrigerator technology, applied in the field of infrared detection, can solve the problems of high energy consumption and high cost of the refrigerator, and achieve the effects of low thermal mass, small size and novel process

Active Publication Date: 2021-06-01
WUHAN GAOXIN TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The invention provides an ultra-miniature MEMS throttling refrigeration infrared detector, which solves the above-mentioned technical problems of high energy consumption and high cost of the mechanical throttling refrigerator itself

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  • Ultra-miniature MEMS throttling refrigeration infrared detector
  • Ultra-miniature MEMS throttling refrigeration infrared detector
  • Ultra-miniature MEMS throttling refrigeration infrared detector

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Embodiment Construction

[0019] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention. In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terms used herein in the description of the present invention are ...

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Abstract

The invention relates to the technical field of infrared detection, in particular to an ultra-miniature MEMS throttling refrigeration infrared detector which comprises an MEMS refrigerator and a packaging Dewar. The MEMS refrigerator comprises a refrigerator heat exchange channel, the packaging Dewar comprises a shell and a ceramic substrate sealed in the shell in a vacuum manner, one face of the ceramic substrate is bonded with the refrigeration heat exchange channel through low-temperature glue, and the other face of the ceramic substrate is fixedly provided with a cold shield and a chip; and the refrigerator heat exchange channel comprises a throttling element, a cold fluid channel and a hot fluid channel, one end of the hot fluid channel is provided with a gas inlet connected with a high-pressure gas source, the other end of the hot fluid channel is communicated with one end of the cold fluid channel after passing through the throttling element, and the other end of the cold fluid channel is provided with a gas outlet which flows to the atmosphere through a channel of the shell. According to the chip-level ultra-miniature refrigerator, a micro-flow channel is prepared through the MEMS technology to replace a mechanically-wound capillary tube, and the advantages that the technology is novel, and the refrigerator is low in heat mass, small in size, low in vibration, free of magnetism and the like are achieved.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to an ultra-miniature MEMS throttling cooling infrared detector. Background technique [0002] The mechanical throttling refrigerator has the characteristics of small size, light weight, compact structure, and no moving parts at the low temperature end, and has a wide range of applications in the field of infrared detection. Due to the large thermal mass of the traditional mechanical throttling refrigerator itself, it needs to consume most of the cooling capacity to cool itself in the process of cooling the device, resulting in problems such as the required cooling capacity and large air consumption. A key factor for the ultra-miniaturization of infrared cooled detectors. How to make a small, low-cost and energy-saving infrared refrigerator is an urgent problem to be solved. Contents of the invention [0003] The invention provides an ultra-miniature MEMS throttling r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F25B23/00B81B7/00B81B7/02
CPCF25B23/00B81B7/0032B81B7/02
Inventor 李晓永王玲黄太和王立保
Owner WUHAN GAOXIN TECH
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