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Semiconductor device storage box

A semiconductor and storage box technology, applied in the direction of instruments, scientific instruments, internal accessories, etc., can solve the problems of silicon wafer quality change analysis, unavailable testing equipment, and real-time monitoring of silicon wafer temperature and humidity changes, etc., to achieve small weight , small size effect

Inactive Publication Date: 2020-04-24
XIAN ESWIN MATERIAL TECH CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, in the existing technology, when storing and transporting silicon wafers, it is impossible to monitor the changes in the temperature and humidity of the environment where the silicon wafers are located in real time, so that the detection equipment cannot obtain sufficient data to analyze the changes in the quality of silicon wafers

Method used

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  • Semiconductor device storage box
  • Semiconductor device storage box
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Embodiment Construction

[0046] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.

[0048] At present, in the silicon wafer industry, changes in temperature and humidity have a very important impact on the quality of silicon wafers...

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Abstract

The invention provides a semiconductor device storage box, and belongs to the technical field of semiconductors. The semiconductor device storage box comprises a box body and a cover body matched withthe box body; and the semiconductor device storage box further comprises a temperature and humidity sensor arranged on the side, facing the box body, of the cover body, a wireless communication unitconnected with the temperature and humidity sensor, and a power supply unit connected with the temperature and humidity sensor and the wireless communication unit. According to the technical scheme, in the silicon wafer transportation process and the silicon wafer storage process, the temperature and the humidity in the storage box can be detected through the temperature and humidity sensor, dataare recorded, and the influence of the temperature and the humidity on the quality of the silicon wafers can be analyzed through the recorded data.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a semiconductor device storage box. Background technique [0002] At present, in the silicon wafer industry, changes in temperature and humidity have a very important impact on the quality of silicon wafers. [0003] However, in the prior art, when silicon wafers are stored and transported, changes in the temperature and humidity of the environment in which the silicon wafers are located cannot be monitored in real time, and the detection equipment cannot obtain sufficient data to analyze changes in the quality of silicon wafers. Contents of the invention [0004] The technical problem to be solved by the present invention is to provide a semiconductor device storage box, which can detect the temperature and humidity inside the storage box through a temperature and humidity sensor during the silicon wafer transportation process and storage process, and record the data. T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02G01K1/02B65D25/02G01K1/022G01K1/024
CPCG01D21/02G01K1/024B65D25/02
Inventor 史进李在桓刘威
Owner XIAN ESWIN MATERIAL TECH CO LTD
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