Residual gas charged particle beam monitoring device and method thereof
A technology of charged particle beam and monitoring device, which is applied in measurement device, radiation measurement, X/γ/cosmic radiation measurement, etc., can solve the problems of complicated operation, poor time resolution, increased cost, etc., and achieves high measurement efficiency and good The effect of position resolution and simple structure
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[0046] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer" and so on is based on the orientation or positional relationship shown in the drawings, and is only for convenience The present invention is described and simplified descriptions do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the present invention. The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0047] Such as Figure 1 ~ Figure 3 As shown, the present invention provides a residual gas charged particle beam monitoring device, which realizes high-precision full-function beam density monitoring based on MCP and charge-collecting pixel chip technology. The device of the present inv...
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