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Single crystal furnace chamber anti-water-channeling plug welding technology

A single crystal furnace and furnace chamber technology, which is applied in welding equipment, manufacturing tools, metal processing equipment, etc., can solve the problems of water barrier, product yield drop, weldment deformation, etc., so as to save man-hours and improve work efficiency. Efficiency and usage reduction effect

Inactive Publication Date: 2020-05-05
GUANGKE VACUUM TECH (TAIXING) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that some large parts are not easy to fix, and after the fixation is removed after welding, the weldment still has a little deformation and large residual stress)
At present, after welding, the single crystal furnace chamber is prone to water barriers not being in the correct position, resulting in water leakage, which greatly reduces the product yield.

Method used

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  • Single crystal furnace chamber anti-water-channeling plug welding technology
  • Single crystal furnace chamber anti-water-channeling plug welding technology
  • Single crystal furnace chamber anti-water-channeling plug welding technology

Examples

Experimental program
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Effect test

Embodiment 1

[0024] Such as figure 1 As shown (for the convenience of illustration, only one water-proof strip and one positioning hole are shown, and the number in actual processing is far more than one. The dotted line in the figure is the line drawn at the position of the water-proof strip 9 to be welded on the inner layer plate 11), The present invention is a single crystal furnace chamber anti-channeling water plug welding process, including the following process steps:

[0025] S1: Laser cut the raw stainless steel plate, and then process the positioning holes 10 on the outer layer plate 8 of the single crystal furnace chamber for plug welding with the water barrier strip 9, and use the cut holes as the outer layer plate 8 and the inner layer plate 8. The stainless steel plate of the layer plate 11 is rolled into a circle, and a line is drawn at the position of the water barrier strip 9 to be welded on the inner layer plate 11 of the single crystal furnace chamber;

[0026] S2: Weld...

Embodiment 2

[0031]The difference from Embodiment 1 is that, as Figure 2 to Figure 4 shown (for ease of illustration, figure 2 Only one inner profiling tooling plate 1 and outer profiling tooling plate 3 are shown; image 3 The middle dotted line is the line where the vertical section of the heavy vertical line passing through the hoisting point intersects with the surface of the furnace chamber shell. From this line, two points as shown in the figure can be determined. image 3 Indicated by two small circles; Figure 4 can also be in image 3 Afterwards, in order to vibrate and aging the furnace chamber shell for the second time, the hoisting state diagram when the furnace chamber shell is reversed), in steps S2 and S3, the inner profiling tooling plate 1 for abutment is used, and the internal profiling tooling plate 1 is used. The tooling plate 1 is arranged on the inner wall of the furnace chamber; the inner profiling tooling plate 1 is not set at the position of the thermometer wi...

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Abstract

The invention discloses a single crystal furnace chamber anti-water-channeling plug welding technology. The single crystal furnace chamber anti-water-channeling plug welding technology comprises the following sequential technological steps: raw materials, namely stainless steel plates are subjected to laser cutting, then a positioning hole is machined in an outer layer plate of a single crystal furnace chamber, wherein the positioning hole is used for plug welding of the outer layer plate and a water stopping strip, the stainless steel plates cut into the outer layer plate and an inner layer plate are coiled, and line marking is conducted on a to-be-welded water stopping strip position of the inner layer plate of the single crystal furnace chamber; the stainless steel water stopping stripis welded to the line-marked position of the inner layer plate through argon arc welding; after the outer layer plate is placed to make the positioning hole correspond to the water stopping strip, theouter layer plate and the water stopping strip are welded to at the positioning hole in a plug welding mode to form an upper furnace chamber or a lower furnace chamber of a double-cylinder structure;and oxide skin occurs on the surface of a weld bead, and is treated through a stainless steel pickling method, and after the surface of the weld bead is subjected to removal of the oxide skin and passivated, polishing is conducted. It can be ensured that the water stopping strip is opposite to a plug welding hole, so that it is ensured that water channeling does not occurs in a single crystal furnace chamber after plug welding, the center of gravity is determined through a suspension method so as to make a deformation direction clear, and the use of copied tools is reduced.

Description

technical field [0001] The invention relates to an anti-channeling water plug welding process for a single crystal furnace chamber. Background technique [0002] The single crystal furnace body (including furnace floor, main furnace chamber, furnace cover, isolation valve chamber, auxiliary furnace chamber, seed crystal lifting and rotating mechanism and crucible lifting and rotating mechanism) is made of 304L stainless steel. The main and lower furnace chambers are double-layer cylindrical structures, with flange structures at both ends, water cooling, and water barriers to ensure uniform cooling. A thermometer window is set in the main furnace room to measure the heater temperature. How to prevent the deformation of the single crystal furnace when its upper furnace chamber is welded is a problem that needs to be solved urgently in this field. At present, the ways to prevent or avoid welding deformation include: heat dissipation method (reducing the heated area to reduce t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00B23K28/02
CPCB23K28/02B23P15/00
Inventor 陈高韵
Owner GUANGKE VACUUM TECH (TAIXING) CO LTD