Biconcave metal semiconductor resonant cavity for nano laser

Abstract

The invention discloses a biconcave metal semiconductor resonant cavity for a nano laser. The biconcave metal semiconductor resonant cavity comprises a semiconductor layer, an insulating layer and a metal layer which are sequentially arranged from inside to outside, wherein the semiconductor layer comprises an InGaAs core layer, a p-doped InP material layer, an n-doped InP material layer and a p-doped InGaAs top contact layer; the lower layer of the InGaAs core layer is a p-doped InP material layer, the upper layer of the InGaAs core layer is an n-doped InP material layer, and a p-doped InGaAstop contact layer is arranged on the n-doped InP material layer; the insulating layer is made of an insulator material SiO<2>, and wraps the side wall and the end surface of the semiconductor layer;and the metal layer is made of a metal material Ag, wraps the insulating layer and is in contact with the semiconductor layer at the top. According to the invention, the radiation loss is reduced, themetal surface plasmon loss is reduced, the structure is simple, the manufacturing is easy, and the threshold current for exciting the resonant cavity is effectively reduced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor nano-lasers, in particular to a double-concave metal-semiconductor resonator used in nano-lasers. Background technique [0002] As an ultra-small light source, metal-semiconductor nanolasers have been widely studied, and they have a wide range of applications in photonic integrated circuits, on-chip optical interconnects, and optical communications. As the volume of the resonator decreases, the loss of the laser increases rapidly, which hinders the further miniaturization of the laser. Currently popular metal-semiconductor nanolasers include two modes, one is the whispering-galley mode and the other is the Fabry-Perot mode. The former has a higher quality factor, but is not conducive to waveguide coupling. The latter typically have a lower quality factor due to the reflection loss of the resonator, but have the advantage of easy coupling of mode energy into the integrated waveguide. [000...

AI Technical Summary

Problems solved by technology

However, the side wall of the capsule resonator is still a straight wall structure, especially the side wall near the curved end face still has a large metal loss

In addition, the modes of these two types of resonators are relatively dispersed, and the resonant modes are not concentrated in the center of the resonator, resulting in large radiation loss.

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