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Fiber laser apparatus and method for processing workpiece

A fiber laser and beam technology, used in laser parts, lasers, laser welding equipment, etc., can solve the problems of power stability and mode stability difficulties of QCW fiber lasers

Active Publication Date: 2020-05-08
IPG PHOTONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Controlling the power stability and mode stability of burst-mode QCW fiber lasers operating at relatively low repetition rates presents technical difficulties

Method used

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  • Fiber laser apparatus and method for processing workpiece
  • Fiber laser apparatus and method for processing workpiece
  • Fiber laser apparatus and method for processing workpiece

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Embodiment Construction

[0063] Reference is now made in detail to the disclosed system. Where feasible, the same or similar reference numerals are used in the drawings and the description to indicate the same or similar components or steps. The drawings are in simplified form and not at all drawn to precise scale. For the purpose of convenience and clarity only, the terms "connect", "couple" and similar terms and their morphological variations do not necessarily denote direct and immediate connections, but also include connections through intermediate elements or devices.

[0064] The aim of the present invention is to use a standard QCW fiber laser in combination with a high-speed scanner to process Si films with processing quality comparable to that of films processed by excimer and burst-mode fiber lasers. The premise that allows this to be achieved is based on the controllable exposure of the Si film to a laser beam of a specific shape, which is scanned over an area of ​​the film at a predetermi...

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Abstract

A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into a plurality of sub-beams deflected towards the surface being processed; guiding the sub-beams through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure durationand have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.

Description

[0001] Background of the Disclosure technical field [0002] The present disclosure relates to methods and apparatus for processing amorphous thin films using continuous wave (CW) or quasi-CW (QCW) high-duty-cycle fiber lasers and high-speed scanning systems, wherein the achieved laser power, beam profile, and scanning speed produce the desired exposure duration and fluence. Background technique [0003] The use of burst mode QCW fiber lasers in fiber laser annealing (FLA) and sequential lateral solidification (SLS) methods of annealing flat panel displays is known. For example, a burst-mode QCW fiber laser for use in an annealing process is disclosed in PCT Application No. PCT / US 16 / 40222 (PCT 40222), which is incorporated herein by reference in its entirety and is licensed by the assignee of the present application jointly owned. Results demonstrated with burst-mode QCW fiber lasers (i.e., lasers that are operated to output multiple long bursts or packets of ultraviolet ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/10H01L21/268
CPCH01L21/02422H01L21/02532H01L21/02678H01L21/02686H01L21/02691B23K26/073B23K26/0821B23K26/0624B23K26/08B23K26/082B23K26/352C23C14/58C23C16/56H01S3/10H01L21/02683C23C14/56
Inventor 亚历山大·里马诺夫迈克尔·冯达尔曾詹姆斯·奥丁利乔舒亚·舍恩利
Owner IPG PHOTONICS CORP