Square silicon core production equipment and manufacturing technology thereof

Abstract

The invention discloses square silicon core production equipment, and relates to the technical field of polycrystalline silicon production. A machine body is included. Four rollers are evenly distributed on the outer edge of the machine body. A silicon bar is hung at the middle position of the machine body. The position, corresponding to the top of the silicon bar, of the machine body is providedwith a bar hanging device. The position, corresponding to the silicon bar, of the bar hanging device is provided with a bar hanging port. The position, corresponding to the bar hanging port, of the machine body is provided with a bar hanging piece. The bar hanging piece comprises a bar hanging head and a bar bonding head which are sequentially connected from top to bottom. The outer diameter of the bar hanging head is matched with the U-shaped bar hanging port. The top of the bar hanging head is provided with a pressing plate. The machine body is movably provided with a plurality of screw jackscrews. The position, corresponding to the upper end face of the bar hanging port, of the bar hanging head is provided with an angle contact joint bearing. The positions, corresponding to the two endsof the two opposite rollers, of the machine body are provided with a tool setting measuring device. The tool setting measuring device comprises four laser distance measuring instruments, the laser distance measuring instruments perpendicular to the silicon bar axial position are arranged on the machine body, tool setting is convenient and fast, the core discharging rate is maximum, and product benefits are increased.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a square silicon core production equipment for producing square silicon cores. Background technique [0002] Monocrystalline silicon is a very important semiconductor material. The development of its production process is divided into the following stages: the first stage is to use molybdenum wire or tantalum tube as heat carrier, which is easy to use and simple in production equipment. The use of tantalum tube is for In the middle, acid can be used to etch away the silicon material of the tantalum tube to prepare single crystal silicon in the zone melting method. However, the diffusion of metal atoms at high temperature affects the purity and quality of polysilicon, and this process was quickly replaced by silicon core heat carrier. The second stage is the production of silicon cores (round silicon cores) by the zone melting method: silicon is a semiconductor, an...

AI Technical Summary

Problems solved by technology

However, the production of silicon cores by the zone melting method has high requirements for operators, and it is difficult to realize the automatic control of mult

Images