Microchip spectrometer with large bandwidth and adjustable resolution

Abstract

The invention relates to a microchip spectrometer with large bandwidth and adjustable resolution. The microchip spectrometer comprises a spectrum coarse segmentation unit A, a tunable ring filter B, asampling spectrum recording and restoring unit C and a reference unit D. The upper output end of the coarse segmentation unit A is connected with the input end of the tunable ring filter B, the loweroutput end of the coarse segmentation unit A is connected with the reference unit D, and the output end of the tunable ring filter B is connected with the sampling spectrum recording and restoring unit C through a 1 * 2 beam splitter. The microchip spectrometer has the advantages of large bandwidth, adjustable resolution and low power consumption, and is suitable for various material platforms.

Description

technical field [0001] The invention relates to a chip spectrometer, in particular to a micro chip spectrometer with large bandwidth and adjustable resolution. Background technique [0002] The spectrometer feeds back the important information of the sample through the spectral analysis of the sample, and has a wide range of applications in environmental protection, biological and chemical detection, industrial and agricultural production, medical diagnosis and astronomical exploration. The photonic integrated spectrometer has the advantages of small size, low cost, good stability, and low power consumption, and has very important application prospects in miniaturized and portable spectral analysis instruments. At present, there are mainly three types of chip spectrometers, the first one is the Fourier transform spectrometer (FPS) based on the on-chip Mach-Zehnder interferometer (MZI) array (literature [1] Przemek J.Bock, et al, "High-resolution Fourier- transform spectrome...

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Problems solved by technology

[0003] Literature [4] J.Zou, et al, "Ultracompact silicon-on-insulator-based reflective arrayed waveguide gratings for spectroscopic applications," Appl.Opt.55, 3531-3536 (2016).), etched diffraction grating (document [5 ]P.Pottier, et al, "Integrated Microspectrometer with Elliptical Bragg Mirror Enhanced Diffraction Gratingon Silicon on Insulator" ACS Photonics 1,430-436(2014); Literature [6]BernardoB.C.Kyotoku, et al, "Sub-nm resolution cavity enhanced micro-spectrometer, "Opt.Express 18, 102-107 (2010)), etc., the problem they face is that with the improvement of the resolution of the spectrometer, the size of the device will increase greatly, and it is difficult to make a performance Good on-chip spectrometer with sub-nanometer resolution; the third category is the use of cascaded microring arrays (literature [7] Z.Xia, et al,"High resolution on-chip spectroscopy based on miniaturized microdonut resonators,"Opt.Express19 ,12356-12364(2011)), but due to the high Q value of the microring, it is very sensitive to process deviation, and it is difficult to make a spectrometer with good performance

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