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A vacuum sealing mechanism, vacuum sealing method and vacuum testing equipment

A testing equipment and vacuum technology, which is applied in the testing of machine/structural components, testing of fluid tightness, liquid tightness measurement using liquid/vacuum degree, etc. With compatibility and other issues, it can achieve the effect of easy processing, simple structure and guaranteed reliability

Active Publication Date: 2022-03-22
JITRI INST OF ORGANIC OPTOELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the cost of this method is high, and there are many types of plugs and they are not compatible, which is not conducive to the standardization of plugs.

Method used

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  • A vacuum sealing mechanism, vacuum sealing method and vacuum testing equipment
  • A vacuum sealing mechanism, vacuum sealing method and vacuum testing equipment
  • A vacuum sealing mechanism, vacuum sealing method and vacuum testing equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] Such as Figure 1-Figure 3 As shown, this embodiment provides a vacuum sealing mechanism for sealing the through hole 101 on the vacuum chamber wall 100 during the vacuum test. Specifically, the vacuum sealing mechanism includes a plug 1 , a fixed block 3 and a plurality of collars 2 with different outer diameters. Wherein, the plug 1 includes a plugging portion 11 and a fixing portion 12 , the diameter of the plugging portion 11 is larger than the diameter of the through hole 101 , and the plugging portion 11 can be attached to one side of the vacuum cavity wall 100 . The collar 2 can be sleeved on the fixing portion 12 and the collar 2 can be detachably locked in the through hole 101 . The fixed block 3 can be attached to the other side of the vacuum chamber wall 100, and the fixed part 12 can be detachably fixedly connected to the fastener 4 through the fixed block 3, so that the sealing part 11 and the vacuum chamber wall 100 are closely attached and The through h...

Embodiment 2

[0063] This embodiment provides another vacuum sealing mechanism. The difference between this embodiment and Embodiment 1 is that the collar 2 is not an integrally formed structure, but is formed by nesting multiple rigid sub-rings. Specifically, the collar 2 includes a plurality of rigid sub-rings, and the plurality of rigid sub-rings can be nested to form collars 2 with different outer diameters. Further, the outer diameters of the multiple rigid sub-rings increase sequentially, and the outer diameter of the kth rigid sub-ring is equal to the inner diameter of the k+1th rigid sub-ring. The nesting form of multiple rigid sub-rings can improve the flexibility of the size of the collar 2 and expand the scope of application of the collar 2 .

Embodiment 3

[0065] This embodiment provides another vacuum sealing mechanism. The difference between this embodiment and Embodiment 1 is that the collar 2 is not an integrally formed structure, but is formed by nesting multiple elastic sub-rings. Specifically, the collar 2 includes a plurality of elastic sub-rings, and the plurality of elastic sub-rings can be nested to form collars 2 with different outer diameters. The elastic form is more convenient for the nesting of multiple elastic sub-rings, and it is also convenient for the collar 2 to be taken out from the through hole 101 .

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Abstract

The invention relates to the technical field of vacuum testing, and discloses a vacuum sealing mechanism, a vacuum sealing method and vacuum testing equipment. Wherein, the vacuum sealing mechanism includes a plug, a fixed block and a plurality of collars with different outer diameters. The plug includes a plugging part and a fixing part, the diameter of the plugging part is larger than that of the through hole, and the plugging part can be attached to one side of the vacuum chamber wall. The collar can be sleeved on the fixing part and detachably clamped in the through hole. The fixing block can be attached to the other side of the vacuum chamber wall, and the fixing part can be detachably fixedly connected to the fastener through the fixing block, so that the sealing part is closely attached to the vacuum chamber wall and the through hole is blocked. The vacuum sealing mechanism provided by the present invention only needs to replace the collars of different sizes according to the size of the through hole without replacing the plugs of different sizes. Since the collar has a simple structure and is easier to process, the cost can be reduced. It is arranged in the through hole, which can prevent the sideways movement of the plug and cause air leakage, and improve the reliability of the seal.

Description

technical field [0001] The invention relates to the technical field of vacuum testing, in particular to a vacuum sealing mechanism, a vacuum sealing method and vacuum testing equipment. Background technique [0002] With the development of the economy, more and more industries need to use vacuum chambers, that is, to evacuate a closed chamber into a vacuum, and perform various processing, handling and operations in this vacuum environment, such as the semiconductor industry, panel display industry, coating industry, solar power generation industry and outer space environment simulation, etc. [0003] During the production process of the vacuum chamber, it is usually necessary to perform leak detection on the vacuum chamber to ensure the airtightness of the vacuum chamber. At present, the more commonly used method is the helium mass spectrometry leak detection method. The principle is to seal the vacuum chamber and pump helium from the outside. If there is a leak point, the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M3/02G01M3/20
CPCG01M3/022G01M3/20
Inventor 武启飞高永喜廖良生梁舰李涛黄稳虞强龙
Owner JITRI INST OF ORGANIC OPTOELECTRONICS CO LTD