Method and device for ethyl borate purification
A technology of ethyl borate and a purification method, which is applied in the field of ethyl borate purification methods and devices, can solve the problem that the purity of ethyl borate products is difficult to meet the process requirements of 7 nanometers, and achieves a high degree of automation, good separation effect and high purification efficiency. Effect
Pending Publication Date: 2020-06-02
大连恒坤新材料有限公司
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[0003] The present invention aims at the proposal of above problem, and studies and designs a kind of ethyl borate purification method, solves the shortcoming that the purity of ethyl borate product of existing purification method is difficult to reach 7 nanometer process requirement
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[0021] Such as figure 1 As shown, the purification device that a kind of ethyl borate purification method depends on can comprise filter, heat exchanger, the first rectifying tower 1, the second rectifying tower 2 and delivery pipeline 3, and filter comprises the 3rd filter 13 , the second filter 14 and the first filter 15, the heat exchanger includes the first heat exchanger 4 and the second heat exchanger 5. The raw material tank 7 is connected to the two first filters 15 and the first heat exchanger 4 successively through the conveying pipeline 3, and the first heat exchanger 4 is connected to the first rectification tower 1, and the tower top of the first rectification tower 1 is connected to each other. The material pipeline is connected with the waste liquid tank 12, and the discharge pipeline at the bottom of the first rectification tower 1 is connected with the second filter 14, the second heat exchanger 5 and the second rectification tower 2 in sequence. The discharg...
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The invention discloses a method and a device for ethyl borate purification. The method comprises the following steps: filtering and preheating an ethyl borate raw material, carrying out first rectification at the temperature of 95-105 DEG C under the pressure of 5-101.3 Pa according to a reflux ratio of 1:(50-0.1), filtering and preheating a liquid fraction after first rectification, carrying outsecond rectification at the temperature of 118-130 DEG C according to a reflux ratio of 1:(50-0.1) under the pressure of 5-101.3 Pa, and condensing and filtering a gaseous fraction after the second rectification to obtain a purified ethyl borate solution. The device comprises a first filter, a second filter, a third filter, a first heat exchanger, a second heat exchanger, a first rectifying towerand a second rectifying tower. The method is a tandem two-stage rectification production process capable of realizing continuous production, low-boiling-point light component impurities are removed firstly, then high-boiling-point heavy component impurities are removed, and impurity particles are removed step by step in the liquid transfer process, so the separation efficiency is high, and the effect is good.
Description
technical field [0001] The invention relates to the field of substance purification and purification devices, in particular to a method and device for purifying ethyl borate. Background technique [0002] At present, a very important factor restricting the development of the semiconductor industry is the semiconductor material. With the development of semiconductor and integrated circuit manufacturing technology, especially after the mainstream process enters 7 nanometers, the process has higher and higher requirements for materials. Among them, ion implantation The purity of ethyl borate (TEB) required for other applications has higher requirements, and the existing purification process has been difficult to meet the requirements of the 7nm process for the removal of metal ions, tiny particles and water in ethyl borate. Contents of the invention [0003] The present invention aims at the above problems, and researches and designs a method for purifying ethyl borate to sol...
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CPCC07F5/04
Inventor 宋增超董岐赵明海安春日王玺张旻昊赵大鹏
Owner 大连恒坤新材料有限公司