MEMS microphone

A microphone and ASIC chip technology, which is applied in the field of MEMS microphones, can solve problems such as short circuit, breakdown open circuit, etc., and achieve the effect of improving reliability, avoiding open circuit or short circuit, and improving dustproof function
CN111225331AActive Publication Date: 2020-06-02AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
AAC ACOUSTIC TECH (SHENZHEN) CO LTD
Publication Date
2020-06-02

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Abstract

The invention provides an MEMS microphone. The MEMS microphone comprises a shell, an MEMS chip and an ASIC chip, wherein the shell is provided with a packaging cavity; the MEMS microphone also comprises a conductive dustproof net which covers an acoustic through hole, a first grounding bonding pad fixedly connected with the conductive dustproof net, a first grounding soldering lug arranged on theouter surface of a substrate and electrically connected with the grounding end of an external circuit, and a metal conductive part electrically connected with the first metal lead, the first groundingbonding pad and the first grounding soldering lug at the same time. The first metal lead leads static electricity in the ASIC chip into the ground layer of an external circuit of the terminal equipment from the first grounding soldering lug or the conductive dustproof net through the guidance of the metal conductive part; the first grounding bonding pad guides static electricity in the substrateinto the ground layer of an external circuit of the terminal equipment through the first grounding soldering lug or the conductive dustproof net under the guidance of the metal conductive part, so that open circuit or short circuit caused by ESD current breakdown of the ASIC chip and the buried capacitor and buried resistor layer in the substrate can be avoided to a great extent.
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Description

【Technical field】

[0001] The invention relates to the technical field of electroacoustic conversion, in particular to a MEMS microphone. 【Background technique】

[0002] MEMS microphone is a power transducer based on MEMS (micro electromechanical system) technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the development of miniaturization and thinning of electronic equipment, MEMS microphones are more and more widely used in electronic equipment.

[0003] The functions of mobile terminals such as mobile phones and tablets are becoming more and more powerful. As the circuit boards become smaller and more integrated, the MEMS microphones in mobile phones are more and more vulnerable to static electricity. ESD (Electro-Static discharge) means "electrostatic discharge". ESD is a discipline formed since the middle of the 20th century to study the generation, harm and protection of static electricity. Therefore, ...

Claims

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