Manufacturing method of optical waveguide multi-micro-channel chip

Abstract

The invention provides a manufacturing method of an optical waveguide multi-micro-channel chip, which comprises the following steps: providing a substrate, forming a sacrificial layer on the substrate, and forming a lower cladding layer on the sacrificial layer; forming a waveguide layer on the lower cladding layer; forming an optical waveguide by the waveguide layer; forming an upper cladding layer on the waveguide layer; forming micro-channels, with the optical waveguide being used for guiding light into the micro-channels along the horizontal direction, and the micro-channels penetrating through the upper cladding layer and the waveguide layer from top to bottom and extending into the lower cladding layer; removing the sacrificial layer so as to peel off the substrate. The width of themicro-channels is 10-100 [mu]m, and the micro-channels do not penetrate through the lower cladding layer. The method has the beneficial effects that an optical waveguide-multi-micro-channel integratedmatrix structure is formed; higher-throughput analysis performance than that of a traditional optical system is achieved through multiple microfluid channels and large-scale matrix optical waveguides, a high-throughput chip-level on-chip optical detection and analysis system of biological samples is rapidly constructed, and a high-throughput chip for biological detection under the micro-nano scale is achieved.

Description

technical field [0001] The invention relates to a manufacturing method of an optical waveguide multi-micro-channel chip, in particular to a manufacturing method of an optical waveguide multi-micro-channel biological detection chip. Background technique [0002] In modern biochemical analysis processes, high-throughput detection equipment has been widely used. Most of these devices use biochips based on microfluidic technology or microwell arrays, loaded in high-performance optical systems, to realize the analysis of biological samples of different sizes such as nucleic acids, proteins, viruses, bacteria, cells, etc. The design of these optical systems is usually based on complex geometric optics, which are bulky, expensive, require optical alignment, and require high maintenance costs. [0003] In the era of precision medicine, miniaturized, high-performance, low-cost and mobile integrated analysis systems have received great attention. Especially the concept of lab on chi...

AI Technical Summary

Problems solved by technology

[0006] In order to solve a series of new requirements such as miniaturization, mobility and integration of modern biochemical analysis instruments, which are bulky and costly and meet the needs of the era of precision medicine

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