Can roll, long substrate processing device, and management method of long substrate processing device

Abstract

An object of the present invention is to provide a can roll that does not leak a cooling gas from a non-wrapping portion region of the can roll around which a long substrate is not wound, and a long substrate processing apparatus using the can roll. The present invention is a can roller with a gas release mechanism, which selectively supplies gas to a plurality of gas introduction channels provided on the can roller through a rotary joint formed by a rotating ring unit (21) and a fixed ring unit (22). Gas, the can roller is characterized in that the arc-shaped packing part (42) embedded in the annular groove (27a) of the fixed ring unit is rotated by the piston part of the packing installation jig (43) to the rotating ring unit The side of the opening (23a) is attached with force, and the rotating opening is closed to prevent gas leakage from the non-wrapped area. In addition, the stroke range of the piston shaft (91) of the piston member is limited, and even if the arc-shaped packing member is worn, since the tip of the piston shaft (91) does not protrude from the rotation opening side, damage to the rotation opening can also be prevented. .

Description

technical field [0001] The present invention relates to performing ion beam treatment in a state where a long substrate such as a long heat-resistant resin film or the like conveyed in a roll-to-roll manner in a vacuum chamber is wound around the outer peripheral surface of a roll roll The invention relates to a long substrate processing apparatus for surface treatment applying thermal load such as sputtering film formation, particularly a gas release mechanism having a high cooling effect, and a tube capable of suppressing gas leakage from the outer peripheral surface of a roll on which the long substrate is not wound. Improvement of the roll and the elongated substrate processing apparatus using the roll roll. Background technique [0002] Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, cellular phones, and the like. The flexible wiring board is produced from a heat-resistant resin film with a metal film in which a metal film...

AI Technical Summary

Problems solved by technology

[0012] However, for the method of Patent Document 5, which uses the film surface to press the valve protruding and retracting from the outer peripheral surface of the can roll to open the gas release port, slight damage or depression may occur on the film surface due to the contact of the valve. Difficult to use in the manufacture of flexible wiring boards that require high-quality electronic equipment

In addition, in the method of Patent Document 6 in which a cover is attached to a region where the film is not wound (non-wrapped region) inside the outer peripheral surface of the can roll, in a processing apparatus that forms a film at a high vacuum degree, the gas It is easy to leak from the gap between the cover and the outer peripheral surface of the can roll. Therefore, it is difficult to adopt the method of Patent Document 6 similarly to the method of Patent Document 5.

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