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Flexible conductive film and preparation method thereof, and sensor

A flexible conductive and flexible film technology, applied in chemical instruments and methods, electromagnetic measuring devices, electric/magnetic solid deformation measurement, etc., can solve the problems of flexible conductive films that are easy to break, and achieve improved stretching range and high stretching sensitivity , Good device stability and repeatability

Active Publication Date: 2020-06-09
BEIJING INST OF CARBON BASED INTEGRATED CIRCUIT +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the above technical problems, the application provides a flexible conductive film and its preparation method, sensor, to solve the problem that the flexible conductive film is easy to break under stretching

Method used

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  • Flexible conductive film and preparation method thereof, and sensor
  • Flexible conductive film and preparation method thereof, and sensor
  • Flexible conductive film and preparation method thereof, and sensor

Examples

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preparation example Construction

[0065] Correspondingly, the embodiment of the present application also provides a method for preparing a flexible conductive film, such as Figure 7 shown, including:

[0066] S101: Provide a substrate, the first surface of the substrate is arranged with a plurality of grooves of preset shapes; refer to Figure 8 , Figure 8 is a schematic cross-sectional structure diagram of the substrate; Figure 8 Among them, 40 represents the substrate, and when the substrate is an anodized aluminum template, the reference numeral 41 represents the aluminum metal layer, 42 represents the first aluminum oxide layer, and 43 represents the second aluminum oxide layer.

[0067] S102: Form a flexible thin film on the first surface of the substrate, the flexible thin film includes a microstructure protruding into the groove and a main body covering the exposed surface of the microstructure and the first surface; refer to Figure 9 , Figure 9 is a schematic diagram of the substrate and its s...

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Abstract

The invention discloses a flexible conductive film and a preparation method thereof, and a sensor. In the stretching process of the flexible conductive film, the bottom of a microstructure on the periphery of deformation buffer units of the flexible film is mainly stretched and deformed, most cracks perpendicular to the stretching direction are generated, and the cracks expand along with the increase of a stretching degree, so the resistance of the conductive film in the stretching direction is obviously increased, and the flexible conductive film has higher stretching sensitivity. In addition, in the stretching process, the shape of the microstructure is almost unchanged, and the number of gully cracks connected between the deformation buffer units in the flexible thin film in a directionparallel to the stretching direction is small, so connected deformation buffer unit micro-islands are formed, the flexible conductive film is guaranteed to conduct current under a tensile strain of about 70%, and the stretching range of a device is widened. After stress is released, the flexible film is recovered to a size before force application, the cracks are closed, and the resistance of a conductive film layer is recovered to an initial size, so the flexible conductive film layer can be repeatedly stretched and repeatedly used.

Description

technical field [0001] The present application relates to the technical field of sensing equipment, and more specifically, relates to a flexible conductive film, a preparation method thereof, and a sensor. Background technique [0002] In applications such as strain sensors, the flexible conductive film refers to a flexible film and a conductive film layer disposed on the flexible film. [0003] In applications such as strain sensors, when the flexible conductive film is deformed due to external pressure, both the flexible film and the conductive film layer will be deformed accordingly, and the resistance of the conductive film layer will change accordingly with the deformation of the conductive film layer. Change, by measuring the resistance change of the conductive film layer when deformation occurs, the magnitude of the external pressure on the flexible conductive film layer or the deformation of the flexible conductive film can be known through the specific corresponding...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B33/00B32B27/06B32B27/28B32B15/08B32B9/00B32B9/04B32B37/24B32B38/10G01B7/16
CPCB32B33/00B32B27/06B32B27/283B32B15/08B32B9/007B32B9/041B32B37/24B32B38/10G01B7/18B32B2037/243B32B2307/202
Inventor 刘又地曾祥雯胡又凡
Owner BEIJING INST OF CARBON BASED INTEGRATED CIRCUIT
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