Hybrid sensor based on vernier effect of parallel structure and manufacturing method thereof

Abstract

The invention discloses a hybrid sensor based on a vernier effect of a parallel structure and a manufacturing method of the hybrid sensor. The hybrid sensor comprises a Michelson interferometer and aFabry-Perot interferometer, wherein the Michelson interferometer and the Fabry-Perot interferometer are arranged in parallel. The Michelson interferometer comprises a single-mode optical fiber a, a spherical structure and a special optical fiber PCF which are sequentially arranged in the optical fiber transmission direction. One end of the single-mode optical fiber a is fixedly connected with oneside of the spherical structure, and the other side of the spherical structure is fixedly connected with one end of a special optical fiber PCF; the Fabry-Perot interferometer comprises a single-modeoptical fiber b, a silicon dioxide microtube b and a single-mode optical fiber c which are sequentially arranged in the optical fiber transmission direction, wherein one end of the single-mode opticalfiber b is fixedly connected with one end of the silicon dioxide microtube b, and the other end of the silicon dioxide microtube b is fixedly connected with one end of the single-mode optical fiber c. The sensor has the advantages of simple structure manufacturing, high sensitivity, high stability, low temperature cross sensitivity and the like.

Description

technical field [0001] The invention relates to a sensor and a manufacturing method thereof, in particular to a hybrid sensor based on a parallel structure vernier effect and a manufacturing method thereof, belonging to the field of optical fiber sensors. Background technique [0002] Optical fiber sensors have attracted much attention due to their advantages such as low transmission loss, corrosion resistance, large measurement dynamic range, and anti-electromagnetic interference. They have been widely used in bridge health monitoring, metallurgy, aerospace and military, especially in flammable, explosive and strong electromagnetic fields. It has great advantages in the sensing of disturbing environments. Due to their unique advantages, they can measure various physical quantities, such as temperature, refractive index, strain, humidity and so on. Among them, temperature and refractive index play a very important role in the field of sensing. [0003] Optical fiber Michel...

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Problems solved by technology

However, most of the vernier effects reported so far are series structures, and there may be problems such as temperature cross-sensitivity and complicated structure fabrication.

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