Coupling system of vacuum atomic force microscope and vacuum atomic force microscope

Abstract

The invention provides a coupling system of a vacuum atomic force microscope and a vacuum atomic force microscope. The coupling system includes a vacuum chamber, an excitation light source arranged outside the vacuum chamber, a detection light source, a light transmission device, and a photoelectric position converter. The excitation light source emits excitation laser to vibrate a probe; the detection light source arranged outside the vacuum chamber is used for emitting detection laser to detect probe deflection information; a part of the light transmission device is arranged outside the vacuum chamber and the light transmission device can receive the excitation laser and the detection laser, and the light transmission device can also transmit the excitation laser and the detection laserreflected by the probe and deflect the excitation laser away; and the photoelectric position converter is used for receiving the detection laser and calculating the stress of the probe according to the detection laser. Reliable measurement in a vacuum environment is realized, the noise in the measurement process is reduced, and the measurement result is ensured to be accurate. Meanwhile, the structure is simple, and the complexity of a coupling system can be reduced.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a coupling system of a vacuum atomic force microscope and a vacuum atomic force microscope. Background technique [0002] Atomic Force Microscope (AFM) is an important tool for measurement, characterization and manipulation in many nanotechnology fields such as physics, materials and biology. AFM technology has various operation modes such as contact, non-contact and dynamic AFM technology. Since the invention of dynamic AFM technology, further improvement of resolution and noise reduction have been its development direction. Therefore, this also puts forward higher requirements for the probe driving and signal detection of the AFM. The more common probe excitation method is mainly piezoelectric excitation, and photoelectric detection is generally used for signal detection. However, due to the existence of a large number of spurious noise peaks in the response spectrum of ...

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Problems solved by technology

[0004] Based on this, it is necessary to provide a vacuum atomic force microscope coupling system and a vacuum atomic force microscope that can measure in a vacuum environment and have a simple structure in view of the current problem that the pollution in the atmosphere affects the measurement accuracy of the atomic force microscope.

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