Flexible integrated all-solid-state thin film battery and preparation method thereof
A thin-film battery and all-solid-state technology, applied in secondary battery manufacturing, electrolyte storage battery manufacturing, batteries, etc.
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[0064] Such as Figure 4 As shown, the embodiment of the present invention also provides a method for preparing a flexible assembled all-solid-state thin film battery, including:
[0065] S402, cleaning the substrate by plasma etching method or high temperature heat treatment method or wet chemical cleaning method;
[0066] S404, using a vacuum evaporation method or an atomic layer deposition method or a chemical vapor deposition method and / or a plasma deposition method or a plasma enhanced chemical vapor deposition method to deposit and prepare a cathode current collector film on a designated area on the substrate;
[0067] S406, preparing a cathode thin film on a designated area on the cathode current collector layer by lithography or radio frequency sputtering;
[0068] S408, annealing to generate a crystal structure to obtain a cathode current collector layer and a cathode layer;
[0069] S410, preparing an electrolyte film on the cathode layer by magnetron sputtering de...
Embodiment 1
[0082] The flexible collective all-solid-state thin-film battery contains 36 all-solid-state thin-film battery cells, and 36 all-solid-state thin-film battery cells are deposited on a 6cm*6cm ceramic substrate. The length and width of an all-solid-state thin-film battery cell are about 0.92cm, thickness 8μm (excluding substrate and flexible layer), all-solid-state thin-film batteries have a single capacity of 0.5mAh, output voltage is 3.9v, and the total capacity of flexible collective all-solid-state thin-film batteries can reach 18mAh after parallel connection. When the discharge depth of the flexible collective all-solid-state film battery is 80% at 25°C, the cycle life of the battery is greater than 1,000 times; the working temperature can be -20°C to 70°C; the self-discharge rate under standard conditions (20°C, one atmosphere) Less than 2% / year; while meeting the needs of wearable devices for power capacity, when applied to wearable devices, the shape can be changed freel...
Embodiment 2
[0094] The flexible collective all-solid-state thin-film battery contains 25 all-solid-state thin-film battery cells, and 25 all-solid-state thin-film battery cells are deposited on a 5.5mm*5.5mm ceramic substrate. The diameter of an all-solid-state battery cell is about 1mm. The thickness is about 1 μm (excluding the substrate and flexible layer), the capacity of a single all-solid-state thin film battery can reach 0.6 μAh, the output voltage is 3.9v, and the total capacity of the battery after parallel connection can reach 15 μAh. While meeting the needs of wearable devices for power capacity, when applied to wearable devices, the shape can be changed freely with body movements, which is highly practical and convenient for industrial production and promotion.
[0095] The preparation method of the flexible collective all-solid-state thin-film battery is the same as in Example 1, wherein the material of the cathode current collector is metal copper, the material of the anode c...
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Abstract
Description
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