Size-adjustable combined crucible thermal field

A combination and crucible technology, which is applied in the direction of condensed steam, single crystal growth, crystal growth, etc., can solve the problems that the thermal field cannot be adjusted, and the size of the crucible is single, so as to improve utilization rate, reduce production cost, location and number of uses Choose from flexible effects

Inactive Publication Date: 2020-06-30
哈尔滨科友半导体产业装备与技术研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the shortcomings of the existing crucible with a single size and the thermal field cannot be adjusted, the present invention provides a size-adjustable combined crucible thermal field. By designing the crucible as a detachable modular structure, different heights can be obtained by combination crucible, so as to meet the needs of single crystal growth of seeds of different sizes

Method used

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  • Size-adjustable combined crucible thermal field
  • Size-adjustable combined crucible thermal field
  • Size-adjustable combined crucible thermal field

Examples

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Effect test

Embodiment 1

[0026] Such as figure 1 As shown, the present invention is a size-adjustable combined crucible thermal field, comprising: a crucible upper cover 1 , a combined crucible barrel 2 , side support components 3 and a crucible bottom 4 .

[0027] The upper cover 1 of the crucible is circular, and threads are processed on the inner side wall of the upper cover 1 of the crucible, which is made of high temperature resistant material, and the high temperature resistant material is composed of graphite and high melting point metal.

[0028] Further, in order to facilitate the temperature measurement by the thermometer, a temperature measurement window 11 may also be provided at the center of the upper cover 1 of the crucible.

[0029] The bottom 4 of the crucible is circular, and the fourth upper surface of the crucible is provided with a connecting surface for threaded connection with the combined crucible barrel 2, and threads are processed on the side wall of the connecting surface. ...

Embodiment 2

[0038] Such as Figure 7 and Figure 8 As shown, the difference between Embodiment 2 and Embodiment 1 is that each single support 31 is spliced ​​by two C-shaped structures, and the splicing surfaces of the two single supports 31 can be plugged or for surface contact. Insertion teeth 32 protruding toward the center of the circle are processed at intervals in the circumferential direction on the inner side wall of each single support member 31 , and the insertion teeth 32 are in a convex-concave structure.

[0039] A heat preservation component 6 is also added inside the combined crucible tube 2 . The upper heat preservation part 6 is in the shape of a truncated cone, and the outer wall of the upper heat preservation part 6 is provided with mating teeth 61 that match the insertion teeth 32 on the single support 31. Through the cooperation of the insertion teeth 32 and the mating teeth 61, the heat preservation The component 6 is clamped in the central through hole 30 of the ...

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Abstract

The invention discloses a size-adjustable combined type crucible thermal field, and belongs to the technical field of smelting equipment; aiming at the fact that an existing crucible cannot adapt to the change of the size of a seed crystal, and the thermal field cannot be adjusted, the thermal field is provided. The crucible thermal field comprises a crucible upper cover, a combined crucible cylinder, a side supporting assembly and a crucible bottom, wherein the combined crucible cylinder is a cylinder body with openings at two ends; the bottom of the combined crucible cylinder is arranged onthe crucible bottom; the crucible upper cover covers a top opening of the combined crucible cylinder; a closed cavity is formed in the combined type crucible cylinder after mounting, the side supporting assembly is mounted on the inner wall of the combined type crucible cylinder through threads, the height of the side supporting assembly located on the inner wall of the combined type crucible cylinder is adjustable, a center through hole is formed in the center of the side supporting assembly, and a seed crystal is mounted at the center through hole. The crucible is of a modular structure andcan be combined and adjusted according to actual needs, single crystal growth of seed crystals of different sizes is achieved, the height of the crucible is adjustable, and thermal fields with different length-diameter ratios can be achieved.

Description

Technical field: [0001] The invention belongs to the technical field of smelting equipment, and in particular relates to a size-adjustable combined crucible heat field. Background technique: [0002] The physical vapor transport PVT method is currently one of the most effective methods for growing Sic crystals. When using the PVT method to prepare silicon carbide SiC or aluminum nitride AlN single crystals, the crucible made of high-temperature resistant materials provides a relatively good environment for the reaction and deposition of gas phase components. confined space. During the crystal growth process, the crucible often needs to be heated above 2000°C for more than 100 hours, which may cause a certain loss to the crucible, and the high-purity crucible material is expensive and usually needs to be imported, and the crucible is formed at one time. Its size cannot be adjusted, which leads to the fixed crystal growth thermal field. Therefore, generally, a crucible of one...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B23/00C30B29/36
CPCC30B23/00C30B29/36
Inventor 赵丽丽张胜涛袁文博范国峰
Owner 哈尔滨科友半导体产业装备与技术研究院有限公司
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