Cleaning and regenerating method of titanium crucible

A technology for crucibles and materials, applied in cleaning methods and utensils, chemical instruments and methods, drying solid materials without heating, etc. The effect of cleaning time, stable performance, and low risk of chemical residues

Inactive Publication Date: 2020-08-04
四川富乐德科技发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to: in view of the influence of product structure on titanium crucible parts in the prior art, organic film residues often exist in the gaps, which have a significant impact on product quality. At present, the organic film is removed by chemical liquid washing. A

Method used

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  • Cleaning and regenerating method of titanium crucible

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Embodiment 1

[0043] A method for cleaning and regenerating a titanium material crucible provided in a preferred embodiment of the present invention comprises the following steps:

[0044] S1 Acceptance inspection: ensure that the body of the titanium crucible has no defects, and determine the residual amount of the film layer;

[0045] S2 chemical potion soaking: remove the residual film on the surface, the chemical potion is different according to the film quality inside the crucible, for example: for the organic material inside the crucible use organic solvent ethanol, acetone, etc. as soaking potion, for the metal material inside the crucible use Nitric acid, hydrochloric acid, etc. are used as soaking liquids,

[0046] S3 pure water washing: remove floating ash and impurities on the surface of the crucible;

[0047] S4 Pre-drying: Air gun blows the surface to remove surface moisture. The temperature in the drying box is 100-200°C. The temperature can be 100, 150, and 200°C. The drying...

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Abstract

The invention discloses a cleaning and regenerating method of a titanium crucible, and relates to the technical field of OLED panel production. The method comprises the following steps of receiving inspection, wherein integrity inspection is carried out on a titanium crucible body, and the residual amount of a film layer is determined; soaking treatment with chemical liquid; pure water flushing and cleaning, wherein the titanium crucible body soaked with the liquid is flushed with pure water, and floating ash and impurities on the surface of the crucible are removed; pre-drying treatment, wherein an air gun is used for blowing the surface of the titanium crucible body flushed with the pure water, surface moisture is removed, and the titanium crucible body is placed in a drying box to be dried; high-temperature baking treatment, wherein the titanium crucible body subjected to pre-drying treatment is subjected to high-temperature baking treatment; pure water soaking operation, wherein the titanium crucible body subjected to high-temperature baking treatment is placed in pure water to be soaked; and drying and packaging, wherein the titanium crucible body soaked with the pure water isdried and packaged for use. The method has the advantages that the crucible residual film is effectively cleaned, and meanwhile the crucible loss is reduced.

Description

technical field [0001] The invention belongs to the technical field of OLED panel production, and in particular relates to a method for cleaning and regenerating a titanium crucible. Background technique [0002] OLED industry, as a key development display technology in China and even in the world, after just over ten years of exploration and innovation, has been comparable to the decades of development of LED, and the industrialization momentum is extremely obvious. The key process of the OLED display process is vacuum evaporation, which is mainly to heat the organic material under vacuum. Due to the different characteristics of the material, some materials will be liquefied and then gasified or directly sublimated, and then fly away from the surface of the material at a certain initial speed. , move to the substrate surface, cool down and deposit to form a thin film. The heater used to store organic evaporation materials is a titanium line source crucible. With the extens...

Claims

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Application Information

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IPC IPC(8): B08B9/08C23G1/00F26B5/04F26B21/00F26B23/00
CPCB08B9/08C23G1/00F26B5/04F26B21/004F26B23/00
Inventor 吕先峰惠朝先向志强李奎
Owner 四川富乐德科技发展有限公司
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