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Large-size MEMS vertical comb micro-mirror and preparation method thereof

A comb-tooth micromirror and large-scale technology, which is applied in the direction of microstructure technology, microstructure devices, and manufacturing microstructure devices, etc., can solve problems such as low process yield, mirror design structure and manufacturing process limitations, and large chip volume. , to achieve the effect of simple and controllable process, stable process and high alignment accuracy

Active Publication Date: 2020-08-18
ANHUI CHINA SCI MW ELECTRONIC TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the above-mentioned shortcoming of prior art, the object of the present invention is to provide a kind of large-scale MEMS vertical comb micromirror and preparation method thereof, be used to solve the volume of large-scale MEMS vertical comb micromirror chip in the prior art. Large, the design of the mirror is limited by the chip structure and manufacturing process, and the process yield is low, etc.

Method used

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  • Large-size MEMS vertical comb micro-mirror and preparation method thereof
  • Large-size MEMS vertical comb micro-mirror and preparation method thereof
  • Large-size MEMS vertical comb micro-mirror and preparation method thereof

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Effect test

Embodiment 1

[0077] This embodiment provides a preparation method of a large-scale MEMS vertical comb micromirror, and realizes the design and manufacture of a large-scale MEMS vertical comb micromirror by using a traditional MEMS process. above, the size, shape and maximum angle of the movable mirror are not limited by the structure and process of the micro-driver, so that the manufacture of a large-size and large-angle movable low-light reflector structure can be realized; in addition, the process is simple and controllable, and the alignment High precision, stable process, suitable for large-scale production, and the shape and thickness of the movable low-light reflector structure can be flexibly selected according to design requirements, with high flexibility and wider application range.

[0078] Such as Figure 1 to Figure 19 Shown, described preparation method comprises the steps:

[0079] Such as Figure 1 to Figure 4 As shown, step S1 is first performed to provide a first silicon...

Embodiment 2

[0115] This embodiment provides a large-scale MEMS vertical comb micromirror, the large-scale MEMS vertical comb micromirror structure can be prepared by the preparation method of the first embodiment, but not limited to the preparation method described in the first embodiment, as long as it can Just form this structure. For the beneficial effects that the large-size MEMS vertical comb micromirror can achieve, please refer to Embodiment 1, which will not be repeated below.

[0116] Such as Figure 20 As shown, the large-scale MEMS vertical comb micromirror includes:

[0117] The movable low-light mirror structure 303 includes a movable mirror surface 304 and the fixed support structure 103 connected thereto;

[0118] a movable platform structure 601 located below the movable low-light reflector structure 303, and bonded to the fixed support structure 103;

[0119] The upper comb structure 207 and the lower comb structure 209 arranged on the outside of the movable platform s...

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Abstract

The invention provides a large-size MEMS vertical comb micro-mirror and a preparation method thereof. The micro-mirror comprises a movable low-light-level reflector structure formed by a movable mirror surface and a fixed supporting structure; a movable platform structure which is positioned below the movable low-light-level reflecting mirror structure and is bonded with the fixed supporting structure; an upper comb tooth structure and a lower comb tooth structure which are arranged on the outer side of the movable platform structure; a substrate which is provided with a motion space and is bonded with the lower comb tooth structure; a metal reflecting layer which is located on the surface of the movable mirror surface, and bonding pads which are located in the upper comb tooth structure lead area and the lower comb tooth structure lead area. According to the structure, the preparation of the large-size MEMS vertical comb micro-mirror is achieved through the MEMS technology, the movable low-light-level reflecting mirror structure is arranged above the micro-actuator, and manufacturing of the large-size large-corner movable low-light-level reflecting mirror structure can be achieved; besides, the manufacturing process is simple and controllable, the structure is suitable for large-scale production, the shape, thickness and the like of the movable low-light-level reflector structure can be flexibly selected according to design requirements, the flexibility is high, and the application range is wider.

Description

technical field [0001] The invention belongs to the technical field of microelectromechanical systems (MEMS), in particular to a large-size MEMS vertical comb micromirror and a preparation method thereof. Background technique [0002] MEMS micromirror is an optical MEMS device that integrates a low-light mirror and a MEMS driver. Because of its small size, low cost, fast response, and high integration, it has become an important direction for technological development. It has broad application prospects in laser scanning, optical communication, digital display, etc. MEMS micromirrors mainly rely on micro-drivers to drive work, and can be divided into electrostatic drive, electromagnetic drive, electrothermal drive, piezoelectric drive and other forms according to the drive mode. Among them, electrostatic drive has the advantages of good compatibility, small size, and mass production, which has become one of the main directions of MEMS micromirror design and process developm...

Claims

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Application Information

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IPC IPC(8): G02B26/08G02B26/10B81B7/02B81C1/00
CPCG02B26/0833G02B26/0841G02B26/105B81C1/00015B81B7/02B81B2201/042
Inventor 李伟徐静
Owner ANHUI CHINA SCI MW ELECTRONIC TECH CO LTD
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