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Forging process specially used for mask plate bracket 420J1

A mask plate and process technology, which is applied in the field of forging process, can solve the problems of poor corrosion resistance, difficult production, and low hardness of the mask plate support, and achieve the effects of good corrosion resistance, improved mechanical properties of products, and reduced production costs

Pending Publication Date: 2020-09-08
上海蓝铸特种合金材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a forging process dedicated to the mask bracket 420J1, which has the advantages of high hardness, good corrosion resistance, and magnetism, and solves the problems of low hardness of the mask bracket and poor corrosion resistance. production difficulties

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] A forging process dedicated to mask plate holder 420J1, comprising the following steps:

[0030] 1) Select the stainless steel 420J1 blank, wash it with acetone, and remove the impurities on the outside of the stainless steel 420J1 blank;

[0031] 2) Cut the cleaned stainless steel 420J1 to 30 cm, put it into the electric arc furnace for heating, the temperature in the electric arc furnace is 980 degrees, keep it warm for 12 minutes, and heat the stainless steel 420J1 with the electric arc furnace;

[0032] 3) Carry out blank forging of the intercepted stainless steel 420J1, control the elongation deformation at 12% of the original billet, send it to a heating furnace at 1000 degrees for solid solution treatment for 1 hour, repeat the elongation operation of stainless steel 420J1 for 3-5 times, and carry out high temperature forging;

[0033] 4) The forged blank is air-cooled, and after trimming, it is sent to a 950-degree heating furnace for 1.5 hours of solid solutio...

Embodiment 2

[0041] A forging process dedicated to mask plate holder 420J1, comprising the following steps:

[0042] 1) Select the stainless steel 420J1 blank, wash it with acetone, and remove the impurities on the outside of the stainless steel 420J1 blank;

[0043] 2) Cut the cleaned stainless steel 420J1 to 45 cm, put it into the electric arc furnace for heating, the temperature in the electric arc furnace is 1040 degrees, keep it warm for 16 minutes, and cooperate with the electric arc furnace to heat treat the stainless steel 420J1;

[0044] 3) Carry out blank forging of the intercepted stainless steel 420J1, control the elongation deformation at 24% of the original billet, send it to a heating furnace at 1000 degrees for solid solution treatment for 1 hour, repeat 3-5 times to elongate the stainless steel 420J1, and carry out high temperature forging;

[0045] 4) The forged blank is air-cooled, and after trimming, it is sent to a 975-degree heating furnace for 1.5 hours of solid sol...

Embodiment 3

[0053] A forging process dedicated to mask plate holder 420J1, comprising the following steps:

[0054] 1) Select the stainless steel 420J1 blank, wash it with acetone, and remove the impurities on the outside of the stainless steel 420J1 blank;

[0055] 2) Cut the cleaned stainless steel 420J1 to 60 cm, put it into the electric arc furnace for heating, the temperature in the electric arc furnace is 1100 degrees, keep it warm for 20 minutes, and heat the stainless steel 420J1 with the electric arc furnace;

[0056]3) Carry out blank forging of the intercepted stainless steel 420J1, control the amount of elongation at 36% of the original billet, send it to a heating furnace at 1000 degrees for solid solution treatment for 1 hour, repeat the elongation operation of stainless steel 420J1 for 3-5 times, and carry out high temperature forging;

[0057] 4) The forged blank is air-cooled, and after trimming, it is sent to a 1000-degree heating furnace for 1.5 hours of solid solution...

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PUM

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Abstract

The invention discloses a forging process specially used for mask plate brackets 420J1. The forging process comprises the steps that a stainless steel 420J1 blank is selected and cleaned with acetone,the cleaned stainless steel 420J1 is cut off by 30-60 cm and put into an electric arc furnace for heating, the temperature in the electric arc furnace is 980-1100 DEG C, the temperature is kept for 12-20 minutes, the cut-off stainless steel 420J1 blank is opened and forged, the elongation deformation is controlled at 12% to 36% of the original blank, the cut-off stainless steel 420J1 blank is sent into a 1000 DEG C heating furnace for solution treatment for 1 hour, the forged blank is air-cooled and sent into a 950-1000 DEG C heating furnace after finishing for solution treatment for 1.5 hours. According to the forging process, through the use of the mask plate bracket 420J1, the surface of a forging part is trimmed, cut, grinded, polished and electroplated, the mask plate bracket is convenient and flexible when assembling and using microelectronic or electrical elements, the forging process is simple, the processing cycle of the mask plate bracket is shortened, the production cost islowered, and the mechanical properties of the forged products are nearly twice as high as those of cast products.

Description

technical field [0001] The present invention relates to the technical field of mask brackets, in particular to a forging process dedicated to the mask bracket 420J1. Background technique [0002] In fields such as microelectronics that require the use of photolithographic patterning processes, mask plates are indispensable tools. It is necessary to use at least one mask plate in the whole product processing process, and in many cases, multiple mask plates are required in the whole process. Moreover, the mask plates used by different products are basically different, so the mask plates need to be replaced as the products change. [0003] The bracket for the mask plays a very important role in the use of the mask. The hardness and corrosion resistance of the mask bracket cannot meet the needs of people today. The hardness of the mask is low and brittle. The forging difficulty of the mask plate bracket increases, which makes the production more difficult. Contents of the in...

Claims

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Application Information

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IPC IPC(8): B21J5/02B21J5/06B23P15/00C21D8/00C21D1/18C21D9/00
CPCB21J5/002B21J5/02B21J5/06C21D1/18C21D8/005C21D9/0068
Inventor 叶兴才叶勇灵
Owner 上海蓝铸特种合金材料有限公司