Copper-containing laminated film etching liquid for liquid crystal panel and application thereof

A liquid crystal panel and etching solution technology, applied in optics, instruments, nonlinear optics, etc., can solve problems such as high cost, achieve cost reduction, avoid bumping, and achieve good etching morphology

Pending Publication Date: 2020-09-15
江苏和达电子科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a liquid crystal panel copper-containing laminated film etchant and its application, which overcomes the pro

Method used

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  • Copper-containing laminated film etching liquid for liquid crystal panel and application thereof
  • Copper-containing laminated film etching liquid for liquid crystal panel and application thereof
  • Copper-containing laminated film etching liquid for liquid crystal panel and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-5 and comparative example 1-4

[0093] The compositions of the etching solutions of Examples and Comparative Examples are shown in Table 1.

[0094] Table 1

[0095]

[0096]

[0097] Use a PP-lined stirred tank with a condenser to produce the above-mentioned etching solution main agent and auxiliary agent (see Table 1), and it can be used after passing the filter (the number of particles with a particle size above 0.5 μm is less than 100). During the production process, maintain the etching solution system below 45°C.

[0098] Use a hand-operated etching machine to etch a TFT substrate with a copper / molybdenum-niobium / IGZO film thickness of 4000 / 200 / 800A, and use different etching times to grasp the optimal etching time for the substrate.

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PUM

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Abstract

The invention provides a copper-containing laminated film etching liquid for a liquid crystal panel and an application thereof. The etching liquid comprises a main agent and an auxiliary agent. A metal copper corrosion inhibitor in the main agent and the auxiliary agent is an amino carbazole metal corrosion inhibitor. According to the copper-containing laminated film etching liquid, the amino carbazole metal corrosion inhibitor is taken as the metal corrosion inhibitor in the main agent and the auxiliary agent, the product cost is lowered, and the etching liquid does not affect the electricalproperties of IGZO according to the corrosion inhibitor, so that the etching effect is better.

Description

technical field [0001] The invention belongs to the field of metal surface chemical treatment, and relates to a liquid crystal panel copper-containing laminated film etchant and application thereof. Background technique [0002] With the development of display technology, liquid crystal displays (Liquid Crystal Display, LCD) and other flat display devices are widely used in mobile phones, televisions, personal Various consumer electronic products such as digital assistants, digital cameras, notebook computers, and desktop computers have become the mainstream of display devices. [0003] The working principle of the liquid crystal display panel is to fill the liquid crystal molecules between the array (TFT) substrate and the color filter (CF) substrate parallel to each other, and adjust the rotation direction of the liquid crystal molecules by adjusting the voltage between the upper and lower substrates, thereby changing the difference on the CF. The amount of light emitted ...

Claims

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Application Information

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IPC IPC(8): C23F1/18C23F1/26G02F1/13
CPCC23F1/18C23F1/26G02F1/1303
Inventor 徐帅张红伟李闯胡天齐钱铁民
Owner 江苏和达电子科技有限公司
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