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Method for Space Shaping Laser-Assisted Etching of Variable Numerical Aperture Microlenses

A numerical aperture and space shaping technology, applied in the field of laser applications, can solve the problems of difficult processing, low processing efficiency of microlenses, and poor shape controllability, and achieve the effect of taking into account processing quality and realizing large-area consistent processing.

Active Publication Date: 2021-04-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problems of low processing efficiency, high processing difficulty, and poor shape controllability of existing microlenses, and provide a method for spatial shaping laser-assisted etching and processing of variable numerical aperture microlenses; the method adopts spatial The Bessel beam obtained by phase shaping can be used to modify the glass, and the high depth-to-diameter ratio characteristic of the Bessel beam can be used to control the modification depth. According to the different numerical aperture requirements, different depths of modification can be realized. A single micro Lens fixed-point laser modification, no translation stage movement, using hydrofluoric acid solution to etch the modified sample, after etching, high-quality micro-lens processing with controllable numerical aperture can be obtained

Method used

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  • Method for Space Shaping Laser-Assisted Etching of Variable Numerical Aperture Microlenses
  • Method for Space Shaping Laser-Assisted Etching of Variable Numerical Aperture Microlenses
  • Method for Space Shaping Laser-Assisted Etching of Variable Numerical Aperture Microlenses

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Effect test

Embodiment 1

[0034] The invention is applicable to the processing of microlenses with controllable numerical apertures of borosilicate glass, BK-7, BK-9 and other glass materials. In this example, BK-9 glass is used as a processing sample. The specific steps of this example are as follows:

[0035] (1) Build a femtosecond laser space shaping processing system. The processing system uses a 2° cone lens to achieve spatial phase shaping and generate Bessel beams. A plano-convex lens with f=150mm and a 20x microscope objective lens are used to realize Bessel beam shrinkage. Build the processing optical path and adjust the height of the translation stage to ensure that the Bessel end is close to the upper surface of the sample.

[0036] (2) Use as attached figure 1 The processing device shown in the figure performs modification processing at different depths, mainly consisting of a femtosecond laser 1, an attenuator 2, an optical switch device 3, a mirror 4, a telescopic system 5, a dichroic...

Embodiment 2

[0041] Simultaneous processing of double-layer microlenses with variable numerical apertures is realized on glass materials. The specific steps of this example are as follows:

[0042] (1) The thickness of the transparent material sample used in the experiment is generally about 1mm. The Bessel beam has the characteristics of a long focal depth, which can penetrate the sample up and down to realize simultaneous modification of the upper surface and the lower surface. Add a ring before the axicon lens The aperture can divide the light into two sections, and by controlling the size of the annular aperture, it is possible to realize synchronous control of the modification depth control of the upper and lower layers, thereby controlling the depth of the microlens.

[0043] (2) By controlling the etching time, the control of the diameter of the microlens is realized, and the double-layer microlens array is formed during the etching process, which greatly improves the processing eff...

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Abstract

The invention relates to a method for processing a microlens with a variable numerical aperture by a space-shaping laser, which belongs to the technical field of laser applications. The method takes into account processing quality, processing efficiency, and shape controllability, and can realize the largest range of control of the numerical aperture of the microlens on the same material. This method adopts the Bessel beam obtained by spatial phase shaping to realize glass modification, and uses the high depth-to-diameter ratio characteristic of the Bessel beam to realize the control of the modification depth. According to the different numerical aperture requirements, different depths of modification can be realized. , a single microlens fixed-point laser modification, no translation stage movement, using hydrofluoric acid solution to etch the modified sample, after etching, high-quality microlens processing with controllable numerical aperture is obtained. This method can take into account the quality, efficiency, and shape control of microlens processing, and meet the different requirements for numerical aperture in microlens applications.

Description

technical field [0001] The invention relates to a method for space-shaping laser-assisted etching and processing microlenses with variable numerical apertures, and belongs to the technical field of laser applications. Background technique [0002] Due to the characteristics of small size, light weight, high degree of integration, and excellent optical performance, micro-curved surfaces have broad application prospects in aerospace, optics, communications and other fields. In the aerospace field, millimeter-scale concave lenses are used in the core components of integral field microscopes. In the field of optics, the microlens array with bionic compound eye structure improves the field of view and expands the imaging range; the application of planar microlens arrays in cameras and virtual reality imaging systems reduces the space of the device and improves the integration of the device; A single microlens is applied to the detection field to realize real-time detection of th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00
CPCG02B3/0025G02B3/0056
Inventor 姜澜秦斌李晓炜刘洋
Owner BEIJING INSTITUTE OF TECHNOLOGYGY