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Workpiece pushing mechanism, netting machine and evaporation system

A workpiece and component technology, applied in the field of workpiece pushing mechanism, net stretcher and evaporation system, can solve the problems of complex structure, high cost, large space occupied by net stretcher, etc., to improve motion resolution and reduce occupation Space and cost reduction effects

Active Publication Date: 2021-11-12
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the pushing mechanism of the existing net stretching machine has a complex structure and high cost. It is necessary to further use the motion table scheme to realize the horizontal three-degree-of-freedom fine alignment of the mask frame. This motion table scheme causes the net tensioner to occupy a large space, The structure is complex, the cost is high, and it also increases the difficulty of combining the mask plate and the mask frame, which affects the installation accuracy of the mask plate, and is not conducive to the quality, accuracy and yield of display products.

Method used

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  • Workpiece pushing mechanism, netting machine and evaporation system
  • Workpiece pushing mechanism, netting machine and evaporation system
  • Workpiece pushing mechanism, netting machine and evaporation system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Please refer to figure 1 , the present embodiment provides a workpiece pushing mechanism CF, including a base body 1, a horizontal driving unit, a vertical driving unit, a clamping unit and a measuring unit. Wherein, the horizontal drive unit includes a horizontal guide part 2, a motor 4, a horizontal movement assembly mainly composed of a first horizontal movement part 6 and a first horizontal movement terminal 9, a second horizontal movement part 3, a second horizontal movement terminal 5. Buffer spring 10; the clamping unit includes a support base 12 and a clamper, the clamper includes a limiter 17 and a roller 18, and the roller 18 can realize the decoupling of the Rz degree of freedom of the workpiece when clamping the workpiece The vertical drive unit is a mechanical device driven by gravity and elastic force, including a vertical guide component 13 , a vertical moving component 14 , a vertical movement terminal 15 and a vertical elastic reset component 16 . The ...

Embodiment 2

[0056] In order to be compatible with the accurate measurement of the workpiece position, that is, to be able to determine the X or Y coordinates and Rz of the workpiece, this embodiment provides a workpiece pushing mechanism, which is compatible with figure 1 Compared with the workpiece pushing mechanism in the first embodiment shown, a grating scale sensor (not shown) is added to the measuring unit, and the grating scale sensor includes a grating main scale (not shown) and a reading head (not shown). Show). The grating main ruler can be arranged on the ball 18, the first moving terminal 9, the first moving part 6, the second moving part 3, the second moving terminal 5, the support seat 12, the pressure sensor 11 or the vertical guide part 13, so The reading head can be arranged on the base body 1 or the horizontal guide part 2 or the motor 4, the reading head is fixed relative to the motor 4 and the base body 1, and the parallelism between the reading head and the grating ma...

Embodiment 3

[0060] Please refer to figure 2 , when the horizontal space permits, this embodiment provides a workpiece pushing mechanism, which is compatible with figure 1 Compared with the workpiece pushing mechanism in the first embodiment shown, the motor 4 and the second moving terminal 5 are no longer nested together, specifically, the second moving terminal 5 is arranged on the side of the first moving terminal 9 facing away from the motor 4 side. The pressure sensor 11 can be fixedly connected to the vertical bracket of the support base 12 , or can be fixedly connected to the second moving terminal 5 .

[0061] In addition, since other parts of the workpiece pushing mechanism of this embodiment can be combined with figure 1 The corresponding parts of the workpiece pushing mechanism in the first embodiment shown are completely the same, therefore, these structures will not be repeated in this embodiment.

[0062] In the workpiece pushing mechanism of this embodiment, since the mo...

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Abstract

The invention provides a workpiece pushing mechanism, a net stretcher and an evaporation system. The workpiece pushing mechanism has a simple structure and low cost, and can be compatible with the functions of pressing the workpiece and driving the horizontal movement of the workpiece, reducing the horizontal occupation space. The stretching machine and vapor deposition system of the present invention have a plurality of said workpiece pushing mechanisms, and through the cooperation of these workpiece pushing mechanisms, the precise alignment and compression of the mask frame can be realized, which is beneficial to reduce the mask plate and The difficulty of combining the mask frame is conducive to the improvement of the quality, precision and yield of display products.

Description

technical field [0001] The invention relates to the technical field of vapor deposition machines, in particular to a workpiece pushing mechanism, a net stretcher and a vapor deposition system. Background technique [0002] At present, the evaporation process is one of the important processes in the process of manufacturing the organic light-emitting layer of the organic light-emitting diode (Organic Light-Emitting Diode, referred to as OLED) display. The desired pattern is formed on the substrate to be evaporated. Among them, the mask assembly includes a mask frame and a mask plate. When the mask plate is combined with the mask frame, it is necessary to use a stretcher to apply pressure to the mask frame to make it pre-deformed, and to make the mask plate After the mask frame is tensioned, the mask plate is fixed on the mask frame, so that the mask plate can be tensioned on the mask frame with a certain tension after the external pulling force is removed. The mask may be a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 李旭李新振
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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