Method and device for testing imaging resolution of nanoscale zone plate

Abstract

The invention discloses a method and a device for testing the imaging resolution of a nanoscale zone plate. The device comprises an X-ray light source, a focusing mirror, a standard resolution plate and an imaging detector. A matched imaging detector is selected and placed on an image plane of the zone plate to be detected according to the design resolution of the zone plate to be detected, a matched standard resolution plate is selected and placed on the object plane of the zone plate to be measured according to the design resolution of the zone plate to be measured; the X-ray light source isused for illuminating the standard resolution plate through the focusing mirror, and light penetrating through the standard resolution plate is imaged on the imaging detector through the zone plate to be detected. The device can detect the resolution of the imaging zone plate most visually and analyze the diffraction efficiency of the imaging zone plate.

Description

technical field [0001] The invention relates to the technical field of X-ray imaging, in particular to a method and device for testing resolution of nanoscale zone plate imaging. Background technique [0002] X-ray is an important scientific research tool. With the continuous development of X-ray sources and X-ray optics, X-ray experimental technology has been widely used in the research of physics, chemistry, life science, material science and many engineering technology fields. Since Roentgen discovered and observed X-rays in 1895, countless scientists have devoted themselves to the research of X-ray sources, X-ray optics and X-ray experimental methods. Numerous Nobel-level scientific research achievements have been born in related fields, such as the discovery of X-rays (Roentgen, 1901), the characteristic X-spectral lines of elements (Bakrah, 1917), the phenomenon of X-ray interference (Laue, 1914), the X-ray Research on crystal structure (Prague and Sons, 1915) and so ...

AI Technical Summary

Problems solved by technology

However, under such high-resolution detection requirements, the field of view is often only on the order of microns, and for millimeter-scale zone plates, only local splicing imaging detection is possible.

Although the above detection method can reflect the structural information of the zone plate to a certain extent, it is only a method to indirectly reflect the resolution ability of the zone plate.

In addition to the above shortcomings, these indirect detection methods cannot obtain the diffraction efficiency information of the zone plate

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