Solar cell and manufacturing method thereof
A solar cell and manufacturing method technology, which is applied to circuits, photovoltaic power generation, electrical components, etc., can solve the problems of cumbersome, complex IBC cell production process, and inability to form polysilicon patterns in one step, so as to reduce production costs, improve production efficiency, and simplify The effect of the production process
Inactive Publication Date: 2020-10-02
ZHEJIANG JINKO SOLAR CO LTD +1
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Problems solved by technology
The above are only the main steps to form polysilicon patterning, but in the actual production process, it will also involve a lot of technical details and corresponding operations. The existing methods cannot form the required polysilicon pattern in one step, which makes the IBC battery The production process is very complicated and cumbersome, which affects the production efficiency of IBC batteries
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[0071] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.
[0072] It should be understood that the term "and / or" used herein is only an association relationship describing associated objects, which means that there may be three relationships, for example, A and / or B, which may mean that A exists alone, and A and B exist simultaneously. B, there are three situations of B alone. In addition, the character " / " in this article generally indicates that the contextual objects are an "or" relationship.
[0073] It should be understood that the orientation words such as "up" and "down" described in the embodiments of the present applicat...
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Abstract
The invention provides a solar cell and a manufacturing method thereof, and relates to the technical field of solar cell preparation. The manufacturing method of the solar cell comprises the followingsteps: forming a dielectric layer on a first surface of a semiconductor substrate with a first polarity; arranging a negative cover with a pattern on the surface of the dielectric layer, depositing apolycrystalline silicon layer on the surface of the dielectric layer, and performing in-situ doping by using a doping element with a second polarity during deposition to form a polycrystalline silicon layer corresponding to the negative mask pattern; removing the negative cover, and forming a passivation layer on the first surface and / or the second surface of the semiconductor substrate; and producing a first electrode and a second electrode on the first surface of the semiconductor substrate, wherein the first electrode penetrates through the passivation layer to be in contact with the semiconductor substrate, and the second electrode penetrates through the passivation layer to be in ohmic contact with the polycrystalline silicon layer. The manufacturing process of the solar cell can besimplified, the efficiency is improved, and the production cost is reduced.
Description
technical field [0001] The present application relates to the technical field of solar cell preparation, in particular to a solar cell and a manufacturing method thereof. Background technique [0002] IBC (Interdigitated back contact) battery is an interdigitated back contact battery, that is, a back contact solar cell. A high short circuit Jsc not only provides a larger space for the conversion efficiency of the battery, but also looks beautiful and is easier to assemble. IBC battery is one of the technical directions to realize high-efficiency crystalline silicon battery at present. [0003] At present, the main reason why IBC batteries have not been mass-produced or affected the promotion of IBC batteries is that the production process of IBC batteries is complicated and the cost is high, especially the process steps for forming the back pattern are relatively complicated. For example, when forming N-type polysilicon or P-type polysilicon, the doped layer needs to be pa...
Claims
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IPC IPC(8): H01L31/18H01L31/0224H01L31/068
CPCH01L31/022458H01L31/0682H01L31/1804Y02E10/546Y02E10/547Y02P70/50
Inventor 徐孟雷杨洁张昕宇金浩
Owner ZHEJIANG JINKO SOLAR CO LTD