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Dynamic high-resolution optical wavefront phase measurement method

A wavefront phase, high-resolution technology, applied in the optical field, can solve the problems of low resolution and low precision, and achieve the effects of good economy, high precision, and no subjective errors.

Active Publication Date: 2021-12-14
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] In order to solve the technical problems of low precision and low resolution of the existing dynamic optical wavefront phase measurement device, the present invention proposes a dynamic high-resolution optical wavefront phase measurement method, which can realize the optical element surface Dynamic high-resolution measurement of wave aberration of shape and optical system, and is not affected by the external environment (air flow disturbance, vibration, etc.), which guarantees the test accuracy well

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  • Dynamic high-resolution optical wavefront phase measurement method
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  • Dynamic high-resolution optical wavefront phase measurement method

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Embodiment Construction

[0099] The present invention will be further described below in conjunction with accompanying drawing.

[0100] Such as figure 1 As shown, the dynamic high-resolution optical wavefront phase measurement device of the present invention consists of a laser 1, a collimating mirror 2, a plane mirror 3, a beam splitter 4, an absorber 5, a hybrid modulation grating 6, a detector 7, a computer 8, The calibration mirror 9, the standard lens 10 and the auxiliary standard flat mirror 13 are composed. figure 1 The dotted lines in the center are replaceable devices.

[0101] Laser 1, collimator 2, and plane reflector 3 are arranged sequentially along the same optical path; plane reflector 3 is used to deflect the output beam of collimator 2 onto beam splitter 4 to reduce the volume of the measuring device; beam splitter 4 is arranged on the output light path of the plane reflector 3; the beam splitter 4 transmits the output light beam of the plane reflector 3 and an absorber 5 is arrang...

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Abstract

In order to solve the technical problems of low precision and low resolution of the existing dynamic optical wavefront phase measurement device, the present invention proposes a dynamic high-resolution optical wavefront phase measurement method, which utilizes a laser, a collimating mirror, and a plane reflecting mirror. , beam splitters, absorbers, hybrid modulation gratings, detectors, computers, different F# standard lenses and calibration mirrors, which can realize active optical testing of the surface shape of optical components and the wave aberration of optical systems. The resolution of the present invention is determined by the size of the pixel of the detector, and high-resolution optical wavefront phase measurement can be realized, and the resolution can be less than 0.01 mm. After the system background error is calibrated once, the present invention is used as the system data, and the measured surface topography information can be calculated and obtained only by collecting an image once during the actual surface profile measurement. influences.

Description

technical field [0001] The invention belongs to the field of optics, and relates to an optical wavefront phase method, in particular to a measuring method capable of dynamically and high-resolution measuring the surface shape of an optical element and the wave aberration of an optical system. Background technique [0002] With the development of my country's space science and technology and high-power laser processing and manufacturing industry, the demand for various high-precision optical components and systems is increasing, and the requirements for the measurement accuracy of optical component surface shape and optical system wave aberration are getting higher and higher. . [0003] The static phase-shifting interferometer driven by traditional piezoelectric ceramics, because the measured wavefront phase result is obtained by phase shifting in the time domain, is easily affected by air flow disturbance and vibration, and cannot meet the dynamic high-precision requirements...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/02G01B11/24G01M11/02
CPCG01J9/02G01B11/2441G01M11/0271G01J2009/002
Inventor 段亚轩达争尚李红光李铭王璞陈晓义陈永权袁索超蔺辉
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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