Comb tooth micro-accelerometer capable of resisting high-g-value impact, and preparation method thereof

Abstract

The invention discloses a comb tooth micro-accelerometer capable of resisting high-g-value impact, and a preparation method thereof. A first fixed anchor block is located on the left side of a movablemass block, a second fixed anchor block is located on the right side of the movable mass block, a first stop block and a first supporting beam are arranged between the first fixed anchor block and the movable mass block, and a second stop block and a second supporting beam are arranged between the second fixed anchor block and the movable mass block. The first supporting beam and the second supporting beam are each of a U-shaped folding structure. One end of the first supporting beam is fixed on the first fixed anchor block; the other end of the first supporting beam is fixed on the left sidesurface of the movable mass block; one end of the second supporting beam is fixed to the second fixed anchor block, the other end of the second supporting beam is fixed to the right side face of themovable mass block, the first stop block is fixed to the first fixed anchor block, and the second stop block is fixed to the second fixed anchor block. The accelerometer has high stability and high gvalue impact resistance.

Description

technical field [0001] The invention belongs to the field of sensor design and preparation technology and anti-shock technology, and relates to a comb-tooth micro-accelerometer and a preparation method thereof which can resist high-g impact. Background technique [0002] Micromachined accelerometers are an important part of MEMS inertial sensors. Compared with traditional accelerometers, microaccelerometers have the advantages of small size, light weight, low cost, and compatibility with integrated circuit technology, so they are widely used in automobiles and Consumer electronics and other fields, but in the field of domestic military weapons and guidance, there are often deficiencies in the application process of accelerometers, such as low accuracy, poor working stability, and poor impact resistance, which seriously restrict the development of military ammunition and weapon systems. quality and efficiency. Compared with other types of micro-accelerometers, capacitive acc...

AI Technical Summary

Problems solved by technology

[0002] Micromachined accelerometers are an important part of MEMS inertial sensors. Compared with traditional accelerometers, microaccelerometers have the advantages of small size, light weight, low cost, and compatibility with integrated circuit technology, so they are widely used in automobiles and Consumer electronics and other fields, but in the field of domestic military weapons and guidance, there are often deficiencies in the application process of accelerometers, such as low accuracy, poor working stability, and poor impact resistance, which seriously restrict the development of military ammunition and weapon systems. quality and efficiency

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